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JPS5798834A - Aberration measuring device - Google Patents

Aberration measuring device

Info

Publication number
JPS5798834A
JPS5798834A JP17492280A JP17492280A JPS5798834A JP S5798834 A JPS5798834 A JP S5798834A JP 17492280 A JP17492280 A JP 17492280A JP 17492280 A JP17492280 A JP 17492280A JP S5798834 A JPS5798834 A JP S5798834A
Authority
JP
Japan
Prior art keywords
lens
luminous flux
transmitted
highly accurately
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17492280A
Other languages
Japanese (ja)
Inventor
Hideki Hosoya
Masayuki Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP17492280A priority Critical patent/JPS5798834A/en
Publication of JPS5798834A publication Critical patent/JPS5798834A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE:To make it possible to measure the abrration in a simple constitution by controlling the deflection scanning by small laser luminous flux through a microcomputer and measuring the position of luminous flux transmitted through a lens to be checked and the like quickly and highly accurately. CONSTITUTION:When optical parameters such as a focal length of the lens to be checked are set by a teletypewriter 46 and the like, a minicomputer 32 computes the corresponding intervals between measuring points and numbers of the measuring points and controls scanning devices 23 and 27 which rotate scanning mirrors 26 and 27. The incident position of the small scanning laser luminous flux to the lens 29 from a laser 20 is computed and stored in a memory. The image which has transmitted through the lens 29 is electrooptically detected by a position sensor 30 comprising many semiconductor elements, which are provided on an image plane in an arbitrary plane and cross to each other at a right angle. The position of the transmitted luminous flux is measured quickly and highly accurately by digital processing. Therefore the automatic measurement can be performed quickly and highly accurately in the simple constitution without photographing, development, and the like.
JP17492280A 1980-12-11 1980-12-11 Aberration measuring device Pending JPS5798834A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17492280A JPS5798834A (en) 1980-12-11 1980-12-11 Aberration measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17492280A JPS5798834A (en) 1980-12-11 1980-12-11 Aberration measuring device

Publications (1)

Publication Number Publication Date
JPS5798834A true JPS5798834A (en) 1982-06-19

Family

ID=15987053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17492280A Pending JPS5798834A (en) 1980-12-11 1980-12-11 Aberration measuring device

Country Status (1)

Country Link
JP (1) JPS5798834A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102853992A (en) * 2012-08-29 2013-01-02 中国科学院长春光学精密机械与物理研究所 Method for improving installation accuracy of collimator tube reticle

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984458A (en) * 1972-12-18 1974-08-14
JPS4995490A (en) * 1972-10-27 1974-09-10
JPS50145249A (en) * 1974-05-08 1975-11-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4995490A (en) * 1972-10-27 1974-09-10
JPS4984458A (en) * 1972-12-18 1974-08-14
JPS50145249A (en) * 1974-05-08 1975-11-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102853992A (en) * 2012-08-29 2013-01-02 中国科学院长春光学精密机械与物理研究所 Method for improving installation accuracy of collimator tube reticle

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