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JPS5788660A - Manufacture of vacuum cylinder for electromagnetic deflecting device - Google Patents

Manufacture of vacuum cylinder for electromagnetic deflecting device

Info

Publication number
JPS5788660A
JPS5788660A JP55165639A JP16563980A JPS5788660A JP S5788660 A JPS5788660 A JP S5788660A JP 55165639 A JP55165639 A JP 55165639A JP 16563980 A JP16563980 A JP 16563980A JP S5788660 A JPS5788660 A JP S5788660A
Authority
JP
Japan
Prior art keywords
vacuum cylinder
film
core material
conductive film
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55165639A
Other languages
Japanese (ja)
Inventor
Mamoru Nakasuji
Tadahiro Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55165639A priority Critical patent/JPS5788660A/en
Publication of JPS5788660A publication Critical patent/JPS5788660A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To enable equalized formation of an antistatic film on the inner wall of a vacuum cylinder by coating the outer surface of a core material, which is worked so that it has the same shape as the internal shape of the vacuum cylinder, with a conductive film, and dissolving and removing the core material after an insulating member is attached on the conductive film. CONSTITUTION:After a core material 1 is subjected to machine work according to the internal shape of a vacuum cylinder, the outer surface of the material 1 is homogeneously coated with a conductive film 2 made of gold, platinum or the like. An insulating member 3 made of a synthetic resin is attached to the outer surface of the film 2, and the member 3 is subjected to machine work according to a desired external shape of the vacuum cylinder. Following that, the material 1 is dissolved and removed with hydrochloric acid or the like, after it is cut so that the etching is facilitated. By the means mentioned above, the film 2 with antistatic property, which is formed on the inner wall of the vacuum cylinder, can be formed from the outer surface and not from the inner surface of the vacuum cylinder. Consequently, the thickness of the film 2 can be equalized, and the electron beam can be stabilized.
JP55165639A 1980-11-25 1980-11-25 Manufacture of vacuum cylinder for electromagnetic deflecting device Pending JPS5788660A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55165639A JPS5788660A (en) 1980-11-25 1980-11-25 Manufacture of vacuum cylinder for electromagnetic deflecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55165639A JPS5788660A (en) 1980-11-25 1980-11-25 Manufacture of vacuum cylinder for electromagnetic deflecting device

Publications (1)

Publication Number Publication Date
JPS5788660A true JPS5788660A (en) 1982-06-02

Family

ID=15816176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55165639A Pending JPS5788660A (en) 1980-11-25 1980-11-25 Manufacture of vacuum cylinder for electromagnetic deflecting device

Country Status (1)

Country Link
JP (1) JPS5788660A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2460487A (en) * 2008-05-23 2009-12-09 Tesla Engineering Ltd A vacuum chamber with multi-layered walls
JP2016081802A (en) * 2014-10-20 2016-05-16 株式会社 テクネックス工房 Electron beam radiation tube

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2460487A (en) * 2008-05-23 2009-12-09 Tesla Engineering Ltd A vacuum chamber with multi-layered walls
JP2016081802A (en) * 2014-10-20 2016-05-16 株式会社 テクネックス工房 Electron beam radiation tube

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