JPS5788660A - Manufacture of vacuum cylinder for electromagnetic deflecting device - Google Patents
Manufacture of vacuum cylinder for electromagnetic deflecting deviceInfo
- Publication number
- JPS5788660A JPS5788660A JP55165639A JP16563980A JPS5788660A JP S5788660 A JPS5788660 A JP S5788660A JP 55165639 A JP55165639 A JP 55165639A JP 16563980 A JP16563980 A JP 16563980A JP S5788660 A JPS5788660 A JP S5788660A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum cylinder
- film
- core material
- conductive film
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
PURPOSE:To enable equalized formation of an antistatic film on the inner wall of a vacuum cylinder by coating the outer surface of a core material, which is worked so that it has the same shape as the internal shape of the vacuum cylinder, with a conductive film, and dissolving and removing the core material after an insulating member is attached on the conductive film. CONSTITUTION:After a core material 1 is subjected to machine work according to the internal shape of a vacuum cylinder, the outer surface of the material 1 is homogeneously coated with a conductive film 2 made of gold, platinum or the like. An insulating member 3 made of a synthetic resin is attached to the outer surface of the film 2, and the member 3 is subjected to machine work according to a desired external shape of the vacuum cylinder. Following that, the material 1 is dissolved and removed with hydrochloric acid or the like, after it is cut so that the etching is facilitated. By the means mentioned above, the film 2 with antistatic property, which is formed on the inner wall of the vacuum cylinder, can be formed from the outer surface and not from the inner surface of the vacuum cylinder. Consequently, the thickness of the film 2 can be equalized, and the electron beam can be stabilized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55165639A JPS5788660A (en) | 1980-11-25 | 1980-11-25 | Manufacture of vacuum cylinder for electromagnetic deflecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55165639A JPS5788660A (en) | 1980-11-25 | 1980-11-25 | Manufacture of vacuum cylinder for electromagnetic deflecting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5788660A true JPS5788660A (en) | 1982-06-02 |
Family
ID=15816176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55165639A Pending JPS5788660A (en) | 1980-11-25 | 1980-11-25 | Manufacture of vacuum cylinder for electromagnetic deflecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5788660A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2460487A (en) * | 2008-05-23 | 2009-12-09 | Tesla Engineering Ltd | A vacuum chamber with multi-layered walls |
JP2016081802A (en) * | 2014-10-20 | 2016-05-16 | 株式会社 テクネックス工房 | Electron beam radiation tube |
-
1980
- 1980-11-25 JP JP55165639A patent/JPS5788660A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2460487A (en) * | 2008-05-23 | 2009-12-09 | Tesla Engineering Ltd | A vacuum chamber with multi-layered walls |
JP2016081802A (en) * | 2014-10-20 | 2016-05-16 | 株式会社 テクネックス工房 | Electron beam radiation tube |
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