JPS5779456A - Voltage readout system by electron beam - Google Patents
Voltage readout system by electron beamInfo
- Publication number
- JPS5779456A JPS5779456A JP55156808A JP15680880A JPS5779456A JP S5779456 A JPS5779456 A JP S5779456A JP 55156808 A JP55156808 A JP 55156808A JP 15680880 A JP15680880 A JP 15680880A JP S5779456 A JPS5779456 A JP S5779456A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- reflected
- signal
- materials
- radiation ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 3
- 230000005855 radiation Effects 0.000 abstract 5
- 239000000463 material Substances 0.000 abstract 4
- 239000000523 sample Substances 0.000 abstract 3
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Tests Of Electronic Circuits (AREA)
- Measurement Of Current Or Voltage (AREA)
Abstract
PURPOSE:To correct an error in voltage readout due to differences of materials, by specifying materials by a reflected electron and correcting a secondary electron signal by using the radiation ratio of the secondary electron characteristics to the materials. CONSTITUTION:When a sample 2 is irradiated with an electron beam 1, a secondary electron and a high-speed reflected electron are obtained from an electron beam probe point and then detected by corresponding detectors 4 and 3 to obtain a secondary-electron signal Ss and a reflected-electron signal Sr. The reflected-electron signal Sr is inputted to a determining circuit 5 for a secondary- electron radiation ratio having an incorporated coordinate table of secondary electron radiation ratios, thus obtaining the secondary electron radiation ratio. Then, the secondary-electron signal Ss and the secondary-electron radiation ratio are inputted to a dividing circuit 6, which finds a voltage at the probe point. Thus, unstable elements due to material effect are removed and the functions of an integrated circuit device are inspected accurately.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55156808A JPS5779456A (en) | 1980-11-06 | 1980-11-06 | Voltage readout system by electron beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55156808A JPS5779456A (en) | 1980-11-06 | 1980-11-06 | Voltage readout system by electron beam |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5779456A true JPS5779456A (en) | 1982-05-18 |
Family
ID=15635770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55156808A Pending JPS5779456A (en) | 1980-11-06 | 1980-11-06 | Voltage readout system by electron beam |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5779456A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EA026694B1 (en) * | 2011-03-14 | 2017-05-31 | Кова Компани, Лтд. | Phenylpyridine derivative and drug containing same |
-
1980
- 1980-11-06 JP JP55156808A patent/JPS5779456A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EA026694B1 (en) * | 2011-03-14 | 2017-05-31 | Кова Компани, Лтд. | Phenylpyridine derivative and drug containing same |
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