JPS5749804A - Method and apparatus for measuring length - Google Patents
Method and apparatus for measuring lengthInfo
- Publication number
- JPS5749804A JPS5749804A JP12634580A JP12634580A JPS5749804A JP S5749804 A JPS5749804 A JP S5749804A JP 12634580 A JP12634580 A JP 12634580A JP 12634580 A JP12634580 A JP 12634580A JP S5749804 A JPS5749804 A JP S5749804A
- Authority
- JP
- Japan
- Prior art keywords
- output
- lenses
- length
- signal
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
PURPOSE:To constitute the device for measuring the length and configuration, by measuring the amount of movement of an optical system in the direction of an optical axis so that the average diameter of a speckle pattern of coherent light generated in reflected light indicates the maximum value. CONSTITUTION:The coherent light from a semiconductor laser 10 passes through lenses 11 and 12, and a Gaussian beam with a beam waist of omega0 is formed. Electrooptical element 13 is arranged in the lenses 11 and 12 and driven by a signal from a signal generator 14, and the length of the light path is equivalently varied. A body O is irradiated by said Gaussian beam, the reflected light is focussed on a light receiving element 20 through lenses 18 and 19, and an image signal corresponding to the speckle grain size is outputted. Said output passes an amplifier 21, a frequency to voltage converter 22, and a band pass filter 23, and the phase of the output is compared with the phase of the signal from the signal generator 14 in sensitive phase detector 24. The output is inputted to a servoamplifier 17. The lens 11 is moved along the optical axis by a linear actuator 16 so that the output of the servoamplifier 17 becomes zero, and the length and the configuration are measured from the amount of movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12634580A JPS5749804A (en) | 1980-09-10 | 1980-09-10 | Method and apparatus for measuring length |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12634580A JPS5749804A (en) | 1980-09-10 | 1980-09-10 | Method and apparatus for measuring length |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5749804A true JPS5749804A (en) | 1982-03-24 |
Family
ID=14932857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12634580A Pending JPS5749804A (en) | 1980-09-10 | 1980-09-10 | Method and apparatus for measuring length |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5749804A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62116816A (en) * | 1985-11-15 | 1987-05-28 | Nippon Sanso Kk | Hot temperature oxygen lance |
| JPH01287725A (en) * | 1988-05-16 | 1989-11-20 | Fuji Xerox Co Ltd | Position designation device |
-
1980
- 1980-09-10 JP JP12634580A patent/JPS5749804A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62116816A (en) * | 1985-11-15 | 1987-05-28 | Nippon Sanso Kk | Hot temperature oxygen lance |
| JPH01287725A (en) * | 1988-05-16 | 1989-11-20 | Fuji Xerox Co Ltd | Position designation device |
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