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JPS574884B2 - - Google Patents

Info

Publication number
JPS574884B2
JPS574884B2 JP4463378A JP4463378A JPS574884B2 JP S574884 B2 JPS574884 B2 JP S574884B2 JP 4463378 A JP4463378 A JP 4463378A JP 4463378 A JP4463378 A JP 4463378A JP S574884 B2 JPS574884 B2 JP S574884B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4463378A
Other languages
Japanese (ja)
Other versions
JPS53134370A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4463378A priority Critical patent/JPS53134370A/en
Publication of JPS53134370A publication Critical patent/JPS53134370A/en
Publication of JPS574884B2 publication Critical patent/JPS574884B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Focusing (AREA)
  • Automatic Focus Adjustment (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP4463378A 1978-04-14 1978-04-14 Focus control device Granted JPS53134370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4463378A JPS53134370A (en) 1978-04-14 1978-04-14 Focus control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4463378A JPS53134370A (en) 1978-04-14 1978-04-14 Focus control device

Publications (2)

Publication Number Publication Date
JPS53134370A JPS53134370A (en) 1978-11-22
JPS574884B2 true JPS574884B2 (en) 1982-01-28

Family

ID=12696819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4463378A Granted JPS53134370A (en) 1978-04-14 1978-04-14 Focus control device

Country Status (1)

Country Link
JP (1) JPS53134370A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100384750B1 (en) * 2000-12-31 2003-05-22 대우종합기계 주식회사 ATC door apparatus for hydraulic fixture of machining center

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57108809A (en) * 1980-12-25 1982-07-07 Fujitsu Ltd Automatic inspection method for magnification and focus of optical reading head

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4412426Y1 (en) * 1966-03-31 1969-05-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100384750B1 (en) * 2000-12-31 2003-05-22 대우종합기계 주식회사 ATC door apparatus for hydraulic fixture of machining center

Also Published As

Publication number Publication date
JPS53134370A (en) 1978-11-22

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