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JPS5748818A - Quartz oscillator unit - Google Patents

Quartz oscillator unit

Info

Publication number
JPS5748818A
JPS5748818A JP12427080A JP12427080A JPS5748818A JP S5748818 A JPS5748818 A JP S5748818A JP 12427080 A JP12427080 A JP 12427080A JP 12427080 A JP12427080 A JP 12427080A JP S5748818 A JPS5748818 A JP S5748818A
Authority
JP
Japan
Prior art keywords
metallic layer
package
layer
airtight sealing
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12427080A
Other languages
Japanese (ja)
Inventor
Hideo Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP12427080A priority Critical patent/JPS5748818A/en
Publication of JPS5748818A publication Critical patent/JPS5748818A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To increase the yield of airtight sealing, by forming a metallic layer for an airtight sealing section at the inside of the package of a quartz oscillator, and a part or all of outside part. CONSTITUTION:Cr, Au layer or Cr, Ni, Au layer is formed on the quartz plane of a framed oscillator 1 with vapor deposition and sputtering method. The outside surface of packages 2, 3 of a quartz oscillator is covered with a metallic layer 5, and the sealing part of the inside surface is covered with a metallic layer 6. The part without the metallic layer 6 for one side is an etched recess. Since metallic layer is given at both sides of the package, the extent of the thermal expansion at both sides is almost equal even at melting temperature of solder through the execution of infrared-ray heating, and the distortion due to difference of stress caused at the sealing part can be made small, allowing to reduce imcompleteness of airtight sealing under vacuum equally. After the airtight sealing, the adjustment of the oscillation frequency of an osillator can be made via the metallic layer with laser. Further, the etching is made easy, by regulating the thickness of the package to <=0.3mm..
JP12427080A 1980-09-08 1980-09-08 Quartz oscillator unit Pending JPS5748818A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12427080A JPS5748818A (en) 1980-09-08 1980-09-08 Quartz oscillator unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12427080A JPS5748818A (en) 1980-09-08 1980-09-08 Quartz oscillator unit

Publications (1)

Publication Number Publication Date
JPS5748818A true JPS5748818A (en) 1982-03-20

Family

ID=14881174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12427080A Pending JPS5748818A (en) 1980-09-08 1980-09-08 Quartz oscillator unit

Country Status (1)

Country Link
JP (1) JPS5748818A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5541467A (en) * 1992-07-03 1996-07-30 Murata Manufacturing Co., Ltd. Vibrating unit
US5541469A (en) * 1993-04-14 1996-07-30 Murata Manufacturing Co., Ltd. Resonator utilizing width expansion mode
US5548179A (en) * 1994-10-17 1996-08-20 Murata Manufacturing Co., Ltd. Chip-type piezoelectric resonance component
US5621263A (en) * 1993-08-09 1997-04-15 Murata Manufacturing Co., Ltd. Piezoelectric resonance component
US5627425A (en) * 1992-07-03 1997-05-06 Murata Manufacturing Co., Ltd. Vibrating unit
US5635882A (en) * 1993-08-17 1997-06-03 Murata Manufacturing Co., Ltd. Laterally coupled piezo-resonator ladder-type filter with at least one bending mode piezo-resonator
US5644274A (en) * 1993-08-17 1997-07-01 Murata Manufacturing Co., Ltd. Stacked piezoelectric resonator ladder-type filter with at least one bending mode resonator
US5701048A (en) * 1993-05-31 1997-12-23 Murata Manufacturing Co., Ltd. Chip-type piezoelectric resonance component

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575417A (en) * 1980-06-12 1982-01-12 Citizen Watch Co Ltd Airtight package for quartz oscillator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575417A (en) * 1980-06-12 1982-01-12 Citizen Watch Co Ltd Airtight package for quartz oscillator

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5541467A (en) * 1992-07-03 1996-07-30 Murata Manufacturing Co., Ltd. Vibrating unit
US5627425A (en) * 1992-07-03 1997-05-06 Murata Manufacturing Co., Ltd. Vibrating unit
US5541469A (en) * 1993-04-14 1996-07-30 Murata Manufacturing Co., Ltd. Resonator utilizing width expansion mode
US5701048A (en) * 1993-05-31 1997-12-23 Murata Manufacturing Co., Ltd. Chip-type piezoelectric resonance component
US5621263A (en) * 1993-08-09 1997-04-15 Murata Manufacturing Co., Ltd. Piezoelectric resonance component
US5635882A (en) * 1993-08-17 1997-06-03 Murata Manufacturing Co., Ltd. Laterally coupled piezo-resonator ladder-type filter with at least one bending mode piezo-resonator
US5644274A (en) * 1993-08-17 1997-07-01 Murata Manufacturing Co., Ltd. Stacked piezoelectric resonator ladder-type filter with at least one bending mode resonator
US5648746A (en) * 1993-08-17 1997-07-15 Murata Manufacturing Co., Ltd. Stacked diezoelectric resonator ladder-type filter with at least one width expansion mode resonator
US5684436A (en) * 1993-08-17 1997-11-04 Murata Manufacturing Co., Ltd. Ladder-type filter with laterally coupled piezoelectric resonators
US5689220A (en) * 1993-08-17 1997-11-18 Murata Manufacturing Co., Ltd. Laterally coupled piezoelectric resonator ladder-type filter with at least one width expansion mode resonator
US5696472A (en) * 1993-08-17 1997-12-09 Murata Manufacturing Co., Ltd. Stacked ladder-type filter utilizing at least one shear mode piezoelectric resonator
US5548179A (en) * 1994-10-17 1996-08-20 Murata Manufacturing Co., Ltd. Chip-type piezoelectric resonance component

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