JPS5735367A - Manufacture of integrated circuit - Google Patents
Manufacture of integrated circuitInfo
- Publication number
- JPS5735367A JPS5735367A JP11061080A JP11061080A JPS5735367A JP S5735367 A JPS5735367 A JP S5735367A JP 11061080 A JP11061080 A JP 11061080A JP 11061080 A JP11061080 A JP 11061080A JP S5735367 A JPS5735367 A JP S5735367A
- Authority
- JP
- Japan
- Prior art keywords
- type
- fixed
- transistor
- polycrystal silicon
- layer pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To eliminate transistor effect of an ion implanted layer by crossing polycrystal silicon layers on isolated diffused layer patterns beforehand. CONSTITUTION:The first type transistor Tr61 is formed and fixed by the first type diffused layer pattern 58 and the corssing of the polycrystal silicon layer patterns 59 and 60. A second type transistor Tr65 is formed and fixed by the second type diffused layer pattern 62 and the crossing of the polycrystal silicon layers 63 and 64. A high potential power source line 66 and a low potential power source line 67 are formed by a metallic wiring layer. First and second type switching contact 68 which connects the input signal lines for the first and second type Trs is formed and fixed. The transistor effect of the horizontal part of the first type Tr61 is eliminated by the ion implanted layer pattern.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11061080A JPS5735367A (en) | 1980-08-12 | 1980-08-12 | Manufacture of integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11061080A JPS5735367A (en) | 1980-08-12 | 1980-08-12 | Manufacture of integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5735367A true JPS5735367A (en) | 1982-02-25 |
Family
ID=14540184
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11061080A Pending JPS5735367A (en) | 1980-08-12 | 1980-08-12 | Manufacture of integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5735367A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0316174A (en) * | 1989-03-17 | 1991-01-24 | Kawasaki Steel Corp | Fundamental cell and arrangement structure of fundamental cells |
US6230635B1 (en) * | 1996-12-27 | 2001-05-15 | Sumitomo Osaka Cement Co. Ltd. | Device and method for combustion of fuel |
-
1980
- 1980-08-12 JP JP11061080A patent/JPS5735367A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0316174A (en) * | 1989-03-17 | 1991-01-24 | Kawasaki Steel Corp | Fundamental cell and arrangement structure of fundamental cells |
US6230635B1 (en) * | 1996-12-27 | 2001-05-15 | Sumitomo Osaka Cement Co. Ltd. | Device and method for combustion of fuel |
US6389998B2 (en) | 1996-12-27 | 2002-05-21 | Sumitomo Osaka Cement Co., Ltd. | Device and method for combustion of fuel |
US6439140B2 (en) | 1996-12-27 | 2002-08-27 | Sumitomo Osaka Cement Co., Ltd. | Device and method for combustion of fuel |
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