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JPS57192909A - Automatic focusing device for optical system expanding obserbation apparatus - Google Patents

Automatic focusing device for optical system expanding obserbation apparatus

Info

Publication number
JPS57192909A
JPS57192909A JP7809681A JP7809681A JPS57192909A JP S57192909 A JPS57192909 A JP S57192909A JP 7809681 A JP7809681 A JP 7809681A JP 7809681 A JP7809681 A JP 7809681A JP S57192909 A JPS57192909 A JP S57192909A
Authority
JP
Japan
Prior art keywords
light
reflected
output
photoelectric element
automatic focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7809681A
Other languages
Japanese (ja)
Other versions
JPH0157328B2 (en
Inventor
Nobuyuki Akiyama
Yoshimasa Oshima
Mitsuyoshi Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7809681A priority Critical patent/JPS57192909A/en
Priority to US06/310,240 priority patent/US4433235A/en
Publication of JPS57192909A publication Critical patent/JPS57192909A/en
Publication of JPH0157328B2 publication Critical patent/JPH0157328B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/245—Devices for focusing using auxiliary sources, detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE:To fix the strength of light reflected by a sample surface and to improve automatic focusing accuracy by subtracting the value corresponding to other reflected light converted from a laser output from an output of a photoelectric element which receives reflected light by the sample surface and other surfaces. CONSTITUTION:Reflected light by a polaroid beam splitter 43 of light 23 projected from a semiconductor laser generator 20 is detected by the 3rd photoelectric element 50. The 2nd photoelectric element 41 detects a part 46 of light reflected by an objective lens and a part 47 of light reflected by a sample and a detection output Va from the 3rd element 50 to which the sum of outputs Vb and Vc from the 2nd element are outputted is converted into Vd through an amplifier 51. An output Vc from a differential amplifier 52 controls the generator 20. Thus, the generator is controlled so that the strength of the reflected light 45 from the sample surface is fixed. Therefore, focusing is precisely detected by a pinhole 32 and a photoelectric element 33 even at the movement of the sample.
JP7809681A 1980-10-09 1981-05-25 Automatic focusing device for optical system expanding obserbation apparatus Granted JPS57192909A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7809681A JPS57192909A (en) 1981-05-25 1981-05-25 Automatic focusing device for optical system expanding obserbation apparatus
US06/310,240 US4433235A (en) 1980-10-09 1981-10-09 Focusing position detecting device in optical magnifying and observing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7809681A JPS57192909A (en) 1981-05-25 1981-05-25 Automatic focusing device for optical system expanding obserbation apparatus

Publications (2)

Publication Number Publication Date
JPS57192909A true JPS57192909A (en) 1982-11-27
JPH0157328B2 JPH0157328B2 (en) 1989-12-05

Family

ID=13652329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7809681A Granted JPS57192909A (en) 1980-10-09 1981-05-25 Automatic focusing device for optical system expanding obserbation apparatus

Country Status (1)

Country Link
JP (1) JPS57192909A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6974938B1 (en) 2000-03-08 2005-12-13 Tibotec Bvba Microscope having a stable autofocusing apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6974938B1 (en) 2000-03-08 2005-12-13 Tibotec Bvba Microscope having a stable autofocusing apparatus
US7016110B2 (en) 2000-03-08 2006-03-21 Tibotec Bvba Microscope suitable for high-throughput screening having an autofocusing apparatus

Also Published As

Publication number Publication date
JPH0157328B2 (en) 1989-12-05

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