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JPS57188120A - Size managing device for quartz oscillator - Google Patents

Size managing device for quartz oscillator

Info

Publication number
JPS57188120A
JPS57188120A JP7324081A JP7324081A JPS57188120A JP S57188120 A JPS57188120 A JP S57188120A JP 7324081 A JP7324081 A JP 7324081A JP 7324081 A JP7324081 A JP 7324081A JP S57188120 A JPS57188120 A JP S57188120A
Authority
JP
Japan
Prior art keywords
quartz oscillator
quartz
profile
etching
tuning fork
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7324081A
Other languages
Japanese (ja)
Inventor
Shigeru Kogure
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP7324081A priority Critical patent/JPS57188120A/en
Publication of JPS57188120A publication Critical patent/JPS57188120A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To manage the size of a manufactured quartz oscillator strictly, by giving a monitor quartz oscillator in profile oxcillation in a quartz wafer and making etching so that this resonance frequency is a specific value. CONSTITUTION:In manufacturing a tuning fork type quartz oscillator with the photolithography method, each tuning fork is formed in a frame 13 in a quartz wafer in the state of linking and a monitor quartz oscillator 14 is formed. An AC electric field is given between gold vapor-deposited films at the upper and lower side of the quartz wafer and the monitor quartz oscillator is in profile oscillation, and the arm width W of the tuning fork is changed with etching, then the profile oscillation frequency can be changed. When the profile oscillation frequency reaches a specific value, the etching is finished.
JP7324081A 1981-05-15 1981-05-15 Size managing device for quartz oscillator Pending JPS57188120A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7324081A JPS57188120A (en) 1981-05-15 1981-05-15 Size managing device for quartz oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7324081A JPS57188120A (en) 1981-05-15 1981-05-15 Size managing device for quartz oscillator

Publications (1)

Publication Number Publication Date
JPS57188120A true JPS57188120A (en) 1982-11-19

Family

ID=13512455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7324081A Pending JPS57188120A (en) 1981-05-15 1981-05-15 Size managing device for quartz oscillator

Country Status (1)

Country Link
JP (1) JPS57188120A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6192020A (en) * 1984-10-11 1986-05-10 Nippon Dempa Kogyo Co Ltd Piezoelectric vibrator for etching monitor
JP2014195134A (en) * 2013-03-28 2014-10-09 Citizen Finetech Miyota Co Ltd Method of manufacturing quartz resonator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6192020A (en) * 1984-10-11 1986-05-10 Nippon Dempa Kogyo Co Ltd Piezoelectric vibrator for etching monitor
JP2014195134A (en) * 2013-03-28 2014-10-09 Citizen Finetech Miyota Co Ltd Method of manufacturing quartz resonator

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