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JPS57176658A - Method and device for astigmatism correction of electron microscope - Google Patents

Method and device for astigmatism correction of electron microscope

Info

Publication number
JPS57176658A
JPS57176658A JP56062050A JP6205081A JPS57176658A JP S57176658 A JPS57176658 A JP S57176658A JP 56062050 A JP56062050 A JP 56062050A JP 6205081 A JP6205081 A JP 6205081A JP S57176658 A JPS57176658 A JP S57176658A
Authority
JP
Japan
Prior art keywords
sample
electron rays
astigmatism
observed
opening angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56062050A
Other languages
Japanese (ja)
Other versions
JPS6332219B2 (en
Inventor
Yukihisa Ishida
Yoshihiro Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56062050A priority Critical patent/JPS57176658A/en
Publication of JPS57176658A publication Critical patent/JPS57176658A/en
Publication of JPS6332219B2 publication Critical patent/JPS6332219B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To enable the state of an astigmatism to be easily confirmed by making the opening angle of electron rays irradiated on a sample large by making the said electron rays to focus close to the position of the sample, and enabling the shape of a fire line developed due to the diffraction halo effect of the sample to be observed on a fluorescent plate. CONSTITUTION:In observing the image of a microscope of a low multiplying factor, reference voltages (e1) and (e3) are applied, respectively, to lens power sources 8 and 9 through gate circuits 10 and 12 by operating a trigger circuit 15 by operating a driving switch 16 used as an observation-mode designating means. In this condition, which corresponds to the mode of ''an astigmatism monitor'', the opening angle (alpha) of electron rays incident upon a sample 1 becomes exceptionally large since electron rays irradiated on the sample 1, which take a route indicated by lines in the figure, focus slightly lower than the position of the sample 1. Imaging lenses, an intermediate lens 4 and the others, are set to have such an excitation intensity that the diffraction halo of the sample 1 can be observed as a fire line on a fluorescent plate 7.
JP56062050A 1981-04-24 1981-04-24 Method and device for astigmatism correction of electron microscope Granted JPS57176658A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56062050A JPS57176658A (en) 1981-04-24 1981-04-24 Method and device for astigmatism correction of electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56062050A JPS57176658A (en) 1981-04-24 1981-04-24 Method and device for astigmatism correction of electron microscope

Publications (2)

Publication Number Publication Date
JPS57176658A true JPS57176658A (en) 1982-10-30
JPS6332219B2 JPS6332219B2 (en) 1988-06-29

Family

ID=13188933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56062050A Granted JPS57176658A (en) 1981-04-24 1981-04-24 Method and device for astigmatism correction of electron microscope

Country Status (1)

Country Link
JP (1) JPS57176658A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003197142A (en) * 2001-12-26 2003-07-11 National Institute For Materials Science Axis adjustment method and apparatus for transmission electron microscope

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945027A (en) * 1972-09-08 1974-04-27
JPS5136196A (en) * 1974-09-20 1976-03-26 Sanyo Jido Hanbaiki Kk
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945027A (en) * 1972-09-08 1974-04-27
JPS5136196A (en) * 1974-09-20 1976-03-26 Sanyo Jido Hanbaiki Kk
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003197142A (en) * 2001-12-26 2003-07-11 National Institute For Materials Science Axis adjustment method and apparatus for transmission electron microscope

Also Published As

Publication number Publication date
JPS6332219B2 (en) 1988-06-29

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