JPS57170897A - Manufacture of quartz oscillator - Google Patents
Manufacture of quartz oscillatorInfo
- Publication number
- JPS57170897A JPS57170897A JP5512781A JP5512781A JPS57170897A JP S57170897 A JPS57170897 A JP S57170897A JP 5512781 A JP5512781 A JP 5512781A JP 5512781 A JP5512781 A JP 5512781A JP S57170897 A JPS57170897 A JP S57170897A
- Authority
- JP
- Japan
- Prior art keywords
- holes
- films
- plate
- thin
- pierced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE: To obtain a quartz oscillator with small dispersion in frequency by a photoetching method by piercing holes with different sizes on the thin metallic films stuck to both sides of a thin quartz plate.
CONSTITUTION: Thin films 18 of a metal such as Cr or Au are formed on both sides of a thin quartz plate 17, and holes corresponding to the shapes of an oscillator and a plurality of holes 19aW19d with gradually enlarged diameters are pierced in the films 18 by photoetching. Photoresist films 20 are laid on the films 18 and patterned in the necessary shape. The plate 17 is then etched with HF to form tuning fork type quartz oscillators 21. At this time, holes 22aW22d are pierced in the plate 17 under the holes 19aW19d. Since the holes 19a are sufficiently small, the holes 22a are pierced to the intermediate part, yet the holes 22d become a through hole because of the large diameter of the holes 19d. The extent of etching is decided according to the state of the holes 22aW22d, and the plate 17 is ethced by the desired extent.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5512781A JPS57170897A (en) | 1981-04-14 | 1981-04-14 | Manufacture of quartz oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5512781A JPS57170897A (en) | 1981-04-14 | 1981-04-14 | Manufacture of quartz oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57170897A true JPS57170897A (en) | 1982-10-21 |
Family
ID=12990090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5512781A Pending JPS57170897A (en) | 1981-04-14 | 1981-04-14 | Manufacture of quartz oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57170897A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0611949A2 (en) * | 1993-02-03 | 1994-08-24 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor and its fabricating method |
| JP2014195134A (en) * | 2013-03-28 | 2014-10-09 | Citizen Finetech Miyota Co Ltd | Method of manufacturing quartz resonator |
-
1981
- 1981-04-14 JP JP5512781A patent/JPS57170897A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0611949A2 (en) * | 1993-02-03 | 1994-08-24 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor and its fabricating method |
| EP0611949A3 (en) * | 1993-02-03 | 1994-11-30 | Matsushita Electric Ind Co Ltd | Angular velocity sensor and its fabricating method. |
| US5445025A (en) * | 1993-02-03 | 1995-08-29 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor having a balanced tuning fork structure and the method of manufacture |
| EP0806631A1 (en) * | 1993-02-03 | 1997-11-12 | Matsushita Electric Industrial Co., Ltd. | Angular velocity and its fabricating |
| US5723788A (en) * | 1993-02-03 | 1998-03-03 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor having a balanced tuning fork structure |
| JP2014195134A (en) * | 2013-03-28 | 2014-10-09 | Citizen Finetech Miyota Co Ltd | Method of manufacturing quartz resonator |
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