[go: up one dir, main page]

JPS57120842A - Detecting method for dust using electric charge coupling element - Google Patents

Detecting method for dust using electric charge coupling element

Info

Publication number
JPS57120842A
JPS57120842A JP616881A JP616881A JPS57120842A JP S57120842 A JPS57120842 A JP S57120842A JP 616881 A JP616881 A JP 616881A JP 616881 A JP616881 A JP 616881A JP S57120842 A JPS57120842 A JP S57120842A
Authority
JP
Japan
Prior art keywords
dust
electric charge
wafer
dimensions
coupling element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP616881A
Other languages
Japanese (ja)
Inventor
Shigeru Takami
Chikasumi Tozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP616881A priority Critical patent/JPS57120842A/en
Publication of JPS57120842A publication Critical patent/JPS57120842A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Dispersion Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To measure powdered dust having a minute grain diameter in the atmosphere accurately and quantitatively in a short time, by using an electric charge coupling element formed many picture elements on a wafer. CONSTITUTION:A main body 1 of electric charge coupling element is constituted by forming many picture elements 3 on a wafer 3. A photodetecting area M of the element 3 is set in several kinds in the range from several microns to several tens microns in accordance with the dimensions of a minute grain diameter dust 5 to be measured. an output signal of each element 3 is supplied to an operation circuit 8 of an operator 7 through a cable 6. When the dust 5 is found on the element 3, incident light to the element 3 is decreased depending on the dimensions of the dust 5 and the transmissivity of the dust to the light and the quantity of electric charge accumulated in the wafer 2 is decreased in the same ratio. The signal of this electric charge is supplied to the circuit 8 and the dimensions of the dust 5 is operated basing on the value of transmissivity of preliminarily supplied dust 5 and the output signal.
JP616881A 1981-01-19 1981-01-19 Detecting method for dust using electric charge coupling element Pending JPS57120842A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP616881A JPS57120842A (en) 1981-01-19 1981-01-19 Detecting method for dust using electric charge coupling element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP616881A JPS57120842A (en) 1981-01-19 1981-01-19 Detecting method for dust using electric charge coupling element

Publications (1)

Publication Number Publication Date
JPS57120842A true JPS57120842A (en) 1982-07-28

Family

ID=11631003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP616881A Pending JPS57120842A (en) 1981-01-19 1981-01-19 Detecting method for dust using electric charge coupling element

Country Status (1)

Country Link
JP (1) JPS57120842A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008042199A2 (en) * 2006-09-29 2008-04-10 Cyberoptics Semiconductor, Inc. Particles sensor integrated with substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008042199A2 (en) * 2006-09-29 2008-04-10 Cyberoptics Semiconductor, Inc. Particles sensor integrated with substrate
WO2008042199A3 (en) * 2006-09-29 2008-07-03 Cyberoptics Semiconductor Inc Particles sensor integrated with substrate
GB2455006A (en) * 2006-09-29 2009-05-27 Cyberoptics Semiconductor Inc Substrate-like particle sensor
JP2010505118A (en) * 2006-09-29 2010-02-18 サイバーオプティクス セミコンダクタ インコーポレイテッド Particle sensor integrated with substrate

Similar Documents

Publication Publication Date Title
JPS57139607A (en) Position measuring equipment
CA1204201A (en) Optical inspection system
JPS57211044A (en) Inspecting device
JPS57141177A (en) Video camera with monitor
JPS5644803A (en) System measuring for thickness of nonmetallic sheet like object
JPS55116226A (en) Discharging current integration-type photodetector
JPS57120842A (en) Detecting method for dust using electric charge coupling element
GB905729A (en) Improved inspection device
JPS5355983A (en) Automatic micro defect detector
GB1248283A (en) Inspection apparatus
JPS57158576A (en) Radiant ray measuring device
JPS5358286A (en) Measuring method of grinding characteristics
JPS51120247A (en) A range finder
JPS5717873A (en) Inspection method of semiconductor element
JPS5788443A (en) Original feed device
JPS6468609A (en) Charging state detecting method for concrete
JPS6425578A (en) Semiconductor container
JPS56147645A (en) Air cleaner
JPS57104121A (en) Exposure control system for camera
JPS51150362A (en) Discharge meter
SU1377815A1 (en) Optical density diital pickup
JPS57128925A (en) Inspection for defect of reticle
JPS55151868A (en) Solid state pickup device
JPS5689046A (en) Gas detector
JPS56101564A (en) Noise measuring device of audio element