JPS57101910A - Method and device for controlling flow rate of gas - Google Patents
Method and device for controlling flow rate of gasInfo
- Publication number
- JPS57101910A JPS57101910A JP17838280A JP17838280A JPS57101910A JP S57101910 A JPS57101910 A JP S57101910A JP 17838280 A JP17838280 A JP 17838280A JP 17838280 A JP17838280 A JP 17838280A JP S57101910 A JPS57101910 A JP S57101910A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- flow rate
- branch pipe
- valve
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
Abstract
PURPOSE:To raise the reliability of a semiconductor device treated by gas, by detecting obstruction of a branch pipe provided on a detecting part, adjusting a position of a valve of a control valve part in accordance with said result, and also securing a prescribed flow rate of gas by providing a correcting circuit. CONSTITUTION:A flow rate of gas flowing in a main pipe is controlled by measuring the quantity of gas flowing in a thin branch pipe which has branched from the main pipe. In the flowing direction of this gas, a control valve part 20 is provided under a gas flow rate detecting part consisting of a flow rate setting part and a comparing and controlling circuit 8, and all gas containing the gas which has passed through the branch pipe is led to the control chamber of the valve part 20. In this state, a valve moving up and down in this control chamber is provided, a position of the valve 13 corresponding to the flow rate of gas is measured by an ammeter 15, obstruction of the branch pipe is detected, and a value of the flow rate of gas in a prescribed state of the branch pipe is decided definitely.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17838280A JPS57101910A (en) | 1980-12-17 | 1980-12-17 | Method and device for controlling flow rate of gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17838280A JPS57101910A (en) | 1980-12-17 | 1980-12-17 | Method and device for controlling flow rate of gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57101910A true JPS57101910A (en) | 1982-06-24 |
Family
ID=16047509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17838280A Pending JPS57101910A (en) | 1980-12-17 | 1980-12-17 | Method and device for controlling flow rate of gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57101910A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61103711U (en) * | 1984-12-06 | 1986-07-02 | ||
| JPS61176609U (en) * | 1985-04-17 | 1986-11-04 | ||
| JPS6370028U (en) * | 1986-10-24 | 1988-05-11 | ||
| JPH01219616A (en) * | 1988-02-29 | 1989-09-01 | Yamatake Honeywell Co Ltd | Gas control valve flow control device |
-
1980
- 1980-12-17 JP JP17838280A patent/JPS57101910A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61103711U (en) * | 1984-12-06 | 1986-07-02 | ||
| JPS61176609U (en) * | 1985-04-17 | 1986-11-04 | ||
| JPS6370028U (en) * | 1986-10-24 | 1988-05-11 | ||
| JPH01219616A (en) * | 1988-02-29 | 1989-09-01 | Yamatake Honeywell Co Ltd | Gas control valve flow control device |
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