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JPS5693325A - Transferring table device - Google Patents

Transferring table device

Info

Publication number
JPS5693325A
JPS5693325A JP16973679A JP16973679A JPS5693325A JP S5693325 A JPS5693325 A JP S5693325A JP 16973679 A JP16973679 A JP 16973679A JP 16973679 A JP16973679 A JP 16973679A JP S5693325 A JPS5693325 A JP S5693325A
Authority
JP
Japan
Prior art keywords
shaft
transference
freely
transferring
belts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16973679A
Other languages
Japanese (ja)
Inventor
Kohei Hori
Akira Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP16973679A priority Critical patent/JPS5693325A/en
Publication of JPS5693325A publication Critical patent/JPS5693325A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To enable the transference of the table with a high positional precision in the both X-Y directions by a method wherein the table is provided on a transferring shaft transference freely in the direction crossing at right angles with the shaft being supported at the both ends with pneumatic bearing mechanisms. CONSTITUTION:The transferring shaft 3 being provided penetrating a sample chamber is supported at the both ends respectively with the pneumatic bearing mechanisms 4, 4, and is constituted transference freely in the direction of the shaft (Y direction). The table 6 is provided on the transferring shaft 3 transference freely in the direction (X direction) crossing at right angles with the direction of the shaft. A rotary shaft 8 is provided concentrically inside the shaft 3 to act as the driving force transmitting mechanism, and the table 6 is connected to the shaft 8 through belts 9. By this constitution, the table 6 is driven to transfer smoothly in the Y direction in accordance with the advance and retreat of the shaft 3. The table 6 is driven to transfer smoothly in the X direction in accordance with the winding operation of the belts 9 by the rotation of the shaft 8. Accordingly the table 6 is transferred extremely effectively in the both X-Y directions.
JP16973679A 1979-12-26 1979-12-26 Transferring table device Pending JPS5693325A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16973679A JPS5693325A (en) 1979-12-26 1979-12-26 Transferring table device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16973679A JPS5693325A (en) 1979-12-26 1979-12-26 Transferring table device

Publications (1)

Publication Number Publication Date
JPS5693325A true JPS5693325A (en) 1981-07-28

Family

ID=15891888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16973679A Pending JPS5693325A (en) 1979-12-26 1979-12-26 Transferring table device

Country Status (1)

Country Link
JP (1) JPS5693325A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5207097A (en) * 1992-08-12 1993-05-04 Gei Systems, Inc. Gear tester with actuator supported platform
US5219389A (en) * 1992-08-12 1993-06-15 Gei Systems, Inc. Gear tester controlling selected degrees of freedom
US5224377A (en) * 1992-08-12 1993-07-06 Gei Systems, Inc. Rigid test table for gear sets

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5207097A (en) * 1992-08-12 1993-05-04 Gei Systems, Inc. Gear tester with actuator supported platform
US5219389A (en) * 1992-08-12 1993-06-15 Gei Systems, Inc. Gear tester controlling selected degrees of freedom
US5224377A (en) * 1992-08-12 1993-07-06 Gei Systems, Inc. Rigid test table for gear sets

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