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JPS5664405A - Method of manufacturing thin film resistor - Google Patents

Method of manufacturing thin film resistor

Info

Publication number
JPS5664405A
JPS5664405A JP14106579A JP14106579A JPS5664405A JP S5664405 A JPS5664405 A JP S5664405A JP 14106579 A JP14106579 A JP 14106579A JP 14106579 A JP14106579 A JP 14106579A JP S5664405 A JPS5664405 A JP S5664405A
Authority
JP
Japan
Prior art keywords
thin film
film resistor
manufacturing thin
manufacturing
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14106579A
Other languages
Japanese (ja)
Inventor
Kunihiro Inoue
Akihiko Kawachi
Yoshinori Miyasaka
Toshio Narita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suwa Seikosha KK
Shiojiri Kogyo KK
Original Assignee
Suwa Seikosha KK
Shiojiri Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suwa Seikosha KK, Shiojiri Kogyo KK filed Critical Suwa Seikosha KK
Priority to JP14106579A priority Critical patent/JPS5664405A/en
Publication of JPS5664405A publication Critical patent/JPS5664405A/en
Pending legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
JP14106579A 1979-10-31 1979-10-31 Method of manufacturing thin film resistor Pending JPS5664405A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14106579A JPS5664405A (en) 1979-10-31 1979-10-31 Method of manufacturing thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14106579A JPS5664405A (en) 1979-10-31 1979-10-31 Method of manufacturing thin film resistor

Publications (1)

Publication Number Publication Date
JPS5664405A true JPS5664405A (en) 1981-06-01

Family

ID=15283420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14106579A Pending JPS5664405A (en) 1979-10-31 1979-10-31 Method of manufacturing thin film resistor

Country Status (1)

Country Link
JP (1) JPS5664405A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5955001A (en) * 1982-08-24 1984-03-29 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Resistor
US8174355B2 (en) 2007-07-13 2012-05-08 Hitachi, Ltd. Semiconductor device and method for manufacturing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5955001A (en) * 1982-08-24 1984-03-29 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Resistor
JPH0376561B2 (en) * 1982-08-24 1991-12-05 Fuiritsupusu Furuuiranpenfuaburiken Nv
US8174355B2 (en) 2007-07-13 2012-05-08 Hitachi, Ltd. Semiconductor device and method for manufacturing the same
TWI401745B (en) * 2007-07-13 2013-07-11 Hitachi Ltd Semiconductor device and manufacturing method thereof

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