JPS5642137B2 - - Google Patents
Info
- Publication number
- JPS5642137B2 JPS5642137B2 JP7468576A JP7468576A JPS5642137B2 JP S5642137 B2 JPS5642137 B2 JP S5642137B2 JP 7468576 A JP7468576 A JP 7468576A JP 7468576 A JP7468576 A JP 7468576A JP S5642137 B2 JPS5642137 B2 JP S5642137B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7468576A JPS5371A (en) | 1976-06-23 | 1976-06-23 | Scribing method of semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7468576A JPS5371A (en) | 1976-06-23 | 1976-06-23 | Scribing method of semiconductor wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5371A JPS5371A (en) | 1978-01-05 |
| JPS5642137B2 true JPS5642137B2 (el) | 1981-10-02 |
Family
ID=13554316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7468576A Granted JPS5371A (en) | 1976-06-23 | 1976-06-23 | Scribing method of semiconductor wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5371A (el) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6125837A (ja) * | 1984-07-16 | 1986-02-04 | 日本石油化学株式会社 | 新規多層構造体 |
| JPS61218841A (ja) * | 1985-03-26 | 1986-09-29 | Nissan Motor Co Ltd | デイスクブレ−キ用ロ−タ |
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1976
- 1976-06-23 JP JP7468576A patent/JPS5371A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5371A (en) | 1978-01-05 |