JPS5641292B2 - - Google Patents
Info
- Publication number
- JPS5641292B2 JPS5641292B2 JP9845072A JP9845072A JPS5641292B2 JP S5641292 B2 JPS5641292 B2 JP S5641292B2 JP 9845072 A JP9845072 A JP 9845072A JP 9845072 A JP9845072 A JP 9845072A JP S5641292 B2 JPS5641292 B2 JP S5641292B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9845072A JPS5641292B2 (de) | 1972-09-30 | 1972-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9845072A JPS5641292B2 (de) | 1972-09-30 | 1972-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4954268A JPS4954268A (de) | 1974-05-27 |
| JPS5641292B2 true JPS5641292B2 (de) | 1981-09-28 |
Family
ID=14220050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9845072A Expired JPS5641292B2 (de) | 1972-09-30 | 1972-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5641292B2 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2616884B1 (fr) * | 1987-06-19 | 1991-05-10 | Air Liquide | Procede de traitement d'effluents gazeux provenant de la fabrication de composants electroniques et appareil d'incineration pour sa mise en oeuvre |
| JPH0767524B2 (ja) * | 1991-03-19 | 1995-07-26 | 株式会社荏原製作所 | 排ガス処理方法および装置 |
-
1972
- 1972-09-30 JP JP9845072A patent/JPS5641292B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4954268A (de) | 1974-05-27 |