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JPS5632116A - Specimen observing device - Google Patents

Specimen observing device

Info

Publication number
JPS5632116A
JPS5632116A JP10662779A JP10662779A JPS5632116A JP S5632116 A JPS5632116 A JP S5632116A JP 10662779 A JP10662779 A JP 10662779A JP 10662779 A JP10662779 A JP 10662779A JP S5632116 A JPS5632116 A JP S5632116A
Authority
JP
Japan
Prior art keywords
specimen
image
light
vidicon
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10662779A
Other languages
Japanese (ja)
Other versions
JPS6245965B2 (en
Inventor
Shusuke Kotake
Takeo Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10662779A priority Critical patent/JPS5632116A/en
Publication of JPS5632116A publication Critical patent/JPS5632116A/en
Publication of JPS6245965B2 publication Critical patent/JPS6245965B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To improve resolving power and S/N, in a phase or a differential interference microscope obtaining the specimen surface image through reflection of the visible light lighted down to the specimen surface, by enabling the image in the specimen to be observed within the same visual field from the back of the specimen by infrared-rays by way of focus adjusting means.
CONSTITUTION: Visible light from a halogen lamp 1 lights down to the specimen through a condenser lens 2, a polarizer 3, a stop 4, a half mirror 5, a Wollaston prism 7, and an objective lens 8. The reflected light advances backward, transmits through a half mirror 5, then via an analyzer 9 and an eyepiece 10, and enters the vidicon incident face of a PBO-PbS vidicon or the like, whereby the surface image is obtained in a TV12. On the other hand, the light from a halogen lamp 13 lights by infrared-rays the specimen 6 from its back via condenser lenses 14a, 14b, a mirror 15, a silicon filter 15a, condenser lenses 16a, 16b and a polarizing plate 17 and the transmitted light thereof is projected similarly on the TV image plane. The focus is adjusted by vertically moving 19. Thereby, the resolving power and S/N may be improved.
COPYRIGHT: (C)1981,JPO&Japio
JP10662779A 1979-08-23 1979-08-23 Specimen observing device Granted JPS5632116A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10662779A JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10662779A JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Publications (2)

Publication Number Publication Date
JPS5632116A true JPS5632116A (en) 1981-04-01
JPS6245965B2 JPS6245965B2 (en) 1987-09-30

Family

ID=14438339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10662779A Granted JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Country Status (1)

Country Link
JP (1) JPS5632116A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184315A (en) * 1983-04-02 1984-10-19 Rikagaku Kenkyusho Specimen condition detection method and laser microscope for that purpose
JPS6050935A (en) * 1983-08-31 1985-03-22 Agency Of Ind Science & Technol Inspecting device for semiconductor wafer
JPS62234113A (en) * 1986-04-04 1987-10-14 Rikagaku Kenkyusho Time-division optical adjusting method
JPS63244753A (en) * 1987-03-31 1988-10-12 Toshiba Corp Defect recognition and processing device
JPH04368146A (en) * 1991-06-14 1992-12-21 Ratotsuku Syst Eng Kk Inspecting equipment for wafer surface
US5198927A (en) * 1989-09-20 1993-03-30 Yale University Adapter for microscope
US5691840A (en) * 1994-12-07 1997-11-25 Samsung Aerospace Industries, Ltd. Video microscope
US5920425A (en) * 1995-09-22 1999-07-06 Samsung Aerospace Industries, Ltd. Internal lighting device for a video microscope system
US6025956A (en) * 1995-12-26 2000-02-15 Olympus Optical Co., Ltd. Incident-light fluorescence microscope
JP2017096956A (en) * 2010-04-26 2017-06-01 ナノテック ソリュシオンＮａｎｏｔｅｃ Ｓｏｌｕｔｉｏｎ Optical apparatus and method for inspecting structural objects

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532936Y1 (en) * 1967-03-31 1970-12-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532936Y1 (en) * 1967-03-31 1970-12-15

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH045169B2 (en) * 1983-04-02 1992-01-30
JPS59184315A (en) * 1983-04-02 1984-10-19 Rikagaku Kenkyusho Specimen condition detection method and laser microscope for that purpose
JPS6050935A (en) * 1983-08-31 1985-03-22 Agency Of Ind Science & Technol Inspecting device for semiconductor wafer
JPH0317217B2 (en) * 1983-08-31 1991-03-07 Kogyo Gijutsuin
JPS62234113A (en) * 1986-04-04 1987-10-14 Rikagaku Kenkyusho Time-division optical adjusting method
JPS63244753A (en) * 1987-03-31 1988-10-12 Toshiba Corp Defect recognition and processing device
US5349468A (en) * 1989-09-20 1994-09-20 Yale University Adapter for microscope
US5198927A (en) * 1989-09-20 1993-03-30 Yale University Adapter for microscope
JPH04368146A (en) * 1991-06-14 1992-12-21 Ratotsuku Syst Eng Kk Inspecting equipment for wafer surface
US5691840A (en) * 1994-12-07 1997-11-25 Samsung Aerospace Industries, Ltd. Video microscope
US5920425A (en) * 1995-09-22 1999-07-06 Samsung Aerospace Industries, Ltd. Internal lighting device for a video microscope system
US6025956A (en) * 1995-12-26 2000-02-15 Olympus Optical Co., Ltd. Incident-light fluorescence microscope
JP2017096956A (en) * 2010-04-26 2017-06-01 ナノテック ソリュシオンＮａｎｏｔｅｃ Ｓｏｌｕｔｉｏｎ Optical apparatus and method for inspecting structural objects

Also Published As

Publication number Publication date
JPS6245965B2 (en) 1987-09-30

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