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JPS5630629A - Inspection jig for optical type face plate fault detector - Google Patents

Inspection jig for optical type face plate fault detector

Info

Publication number
JPS5630629A
JPS5630629A JP10610079A JP10610079A JPS5630629A JP S5630629 A JPS5630629 A JP S5630629A JP 10610079 A JP10610079 A JP 10610079A JP 10610079 A JP10610079 A JP 10610079A JP S5630629 A JPS5630629 A JP S5630629A
Authority
JP
Japan
Prior art keywords
face plate
detector
diameter
thickness
light spot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10610079A
Other languages
Japanese (ja)
Inventor
Yasuo Hachikake
Etsuro Egashira
Michio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP10610079A priority Critical patent/JPS5630629A/en
Publication of JPS5630629A publication Critical patent/JPS5630629A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To obtain an inspection jig easy to handle and having high inspection accuracy by providing stepped parts each having a width dimension larger than the diameter of a light spot irradiated from a detector, on a face plate in a combination of a plurality of rows. CONSTITUTION:Stepped parts 2 each having a width dimension larger than the diameter D of a light spot irradiated from an optical type fault detector and having a thickness dimension d of several steps, is provided on a face plate 1 in a combination of a plurality of rows. For example, on the surface of the silicone wafer 1, there are provided rectilear silicone stepped parts 2 each having the thickness d of suitable four steps, and a pattern width w larger than the diameter D of the light spot irradiated are arranged and formed, four each in three directions, i.e., rectangular direction, and 45 deg. direction. The relation of a scattered light detecting signal voltage v of the light receiver 4 with respect to the thickness d of the stepped part is measured in advance, and the measured relation is used for the presumption of the size of the fault forming a linear shape and inspection of the detection function of the detector.
JP10610079A 1979-08-22 1979-08-22 Inspection jig for optical type face plate fault detector Pending JPS5630629A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10610079A JPS5630629A (en) 1979-08-22 1979-08-22 Inspection jig for optical type face plate fault detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10610079A JPS5630629A (en) 1979-08-22 1979-08-22 Inspection jig for optical type face plate fault detector

Publications (1)

Publication Number Publication Date
JPS5630629A true JPS5630629A (en) 1981-03-27

Family

ID=14425092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10610079A Pending JPS5630629A (en) 1979-08-22 1979-08-22 Inspection jig for optical type face plate fault detector

Country Status (1)

Country Link
JP (1) JPS5630629A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62250345A (en) * 1986-04-23 1987-10-31 Hoya Corp Substrate for test
KR100933704B1 (en) 2007-10-02 2009-12-24 삼성중공업 주식회사 Measurement accuracy verification jig of 3D shape measurement system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62250345A (en) * 1986-04-23 1987-10-31 Hoya Corp Substrate for test
KR100933704B1 (en) 2007-10-02 2009-12-24 삼성중공업 주식회사 Measurement accuracy verification jig of 3D shape measurement system

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