JPS561745B2 - - Google Patents
Info
- Publication number
- JPS561745B2 JPS561745B2 JP11856275A JP11856275A JPS561745B2 JP S561745 B2 JPS561745 B2 JP S561745B2 JP 11856275 A JP11856275 A JP 11856275A JP 11856275 A JP11856275 A JP 11856275A JP S561745 B2 JPS561745 B2 JP S561745B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50118562A JPS5243355A (en) | 1975-10-01 | 1975-10-01 | Test data transfer device for electric particle line eqipment |
| GB14694/76A GB1560722A (en) | 1975-04-23 | 1976-04-09 | Scanning electron microscope |
| US05/678,770 US4020343A (en) | 1975-04-23 | 1976-04-21 | Scanning electron device |
| FR7611920A FR2309034A1 (fr) | 1975-04-23 | 1976-04-22 | Microscope electronique a balayage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50118562A JPS5243355A (en) | 1975-10-01 | 1975-10-01 | Test data transfer device for electric particle line eqipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5243355A JPS5243355A (en) | 1977-04-05 |
| JPS561745B2 true JPS561745B2 (fi) | 1981-01-14 |
Family
ID=14739657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50118562A Granted JPS5243355A (en) | 1975-04-23 | 1975-10-01 | Test data transfer device for electric particle line eqipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5243355A (fi) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59148254A (ja) * | 1983-02-10 | 1984-08-24 | Jeol Ltd | 走査電子顕微鏡等の試料移動装置 |
| JP2760786B2 (ja) * | 1987-03-18 | 1998-06-04 | 株式会社日立製作所 | 走査電子顕微鏡およびその試料台移動方法 |
| JPH02174046A (ja) * | 1988-12-27 | 1990-07-05 | Hitachi Ltd | 電子顕微鏡およびこれに用いる試料微動装置の制御方法 |
| JP2544661B2 (ja) * | 1988-12-27 | 1996-10-16 | 株式会社日立製作所 | 試料台移動装置およびこれを用いた電子顕微鏡 |
| JP2017084483A (ja) | 2015-10-23 | 2017-05-18 | 日本電子株式会社 | キャリブレーション方法および荷電粒子線装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5341062A (en) * | 1977-05-12 | 1978-04-14 | Nippon Fuirutaa Kk | Purifying method and apparatus for drainage by microorganism |
-
1975
- 1975-10-01 JP JP50118562A patent/JPS5243355A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5341062A (en) * | 1977-05-12 | 1978-04-14 | Nippon Fuirutaa Kk | Purifying method and apparatus for drainage by microorganism |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5243355A (en) | 1977-04-05 |