JPS5616538B2 - - Google Patents
Info
- Publication number
- JPS5616538B2 JPS5616538B2 JP15057877A JP15057877A JPS5616538B2 JP S5616538 B2 JPS5616538 B2 JP S5616538B2 JP 15057877 A JP15057877 A JP 15057877A JP 15057877 A JP15057877 A JP 15057877A JP S5616538 B2 JPS5616538 B2 JP S5616538B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15057877A JPS5483377A (en) | 1977-12-16 | 1977-12-16 | Correction method of pattern of photo mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15057877A JPS5483377A (en) | 1977-12-16 | 1977-12-16 | Correction method of pattern of photo mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5483377A JPS5483377A (en) | 1979-07-03 |
| JPS5616538B2 true JPS5616538B2 (en) | 1981-04-16 |
Family
ID=15499936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15057877A Granted JPS5483377A (en) | 1977-12-16 | 1977-12-16 | Correction method of pattern of photo mask |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5483377A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6181230A (en) * | 1984-09-28 | 1986-04-24 | Yanmar Diesel Engine Co Ltd | Automatic tractor control device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2877838B2 (en) * | 1989-06-06 | 1999-04-05 | 大日本印刷株式会社 | How to repair defects such as emulsion masks |
| TW541605B (en) | 2000-07-07 | 2003-07-11 | Hitachi Ltd | Fabrication method of semiconductor integrated circuit device |
| JP3760086B2 (en) | 2000-07-07 | 2006-03-29 | 株式会社ルネサステクノロジ | Photomask manufacturing method |
-
1977
- 1977-12-16 JP JP15057877A patent/JPS5483377A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6181230A (en) * | 1984-09-28 | 1986-04-24 | Yanmar Diesel Engine Co Ltd | Automatic tractor control device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5483377A (en) | 1979-07-03 |