JPS56153207A - Measuring device for film thickness - Google Patents
Measuring device for film thicknessInfo
- Publication number
- JPS56153207A JPS56153207A JP5655480A JP5655480A JPS56153207A JP S56153207 A JPS56153207 A JP S56153207A JP 5655480 A JP5655480 A JP 5655480A JP 5655480 A JP5655480 A JP 5655480A JP S56153207 A JPS56153207 A JP S56153207A
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- scanning element
- beams
- quick
- solid state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 abstract 4
- 238000005259 measurement Methods 0.000 abstract 2
- 239000007787 solid Substances 0.000 abstract 2
- 241001507928 Aria Species 0.000 abstract 1
- 235000004494 Sorbus aria Nutrition 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To realize a quick and high-precision measurement of a film thickness, by introducing the wavelength reference beam at the same time putting the separated beams into a solid state scanning element and then supplying the output of the scanning element to an arithmetic device in case when the film thickness is measured by means of the equally inclined angle interference. CONSTITUTION:The white beams sent from the light source 12 are turned into parallel beams through the lens 14 and beam splitter 15 and then put into the surface of sample 11 covered with a thin film 17. The reflected light which caused an interference is separated via the concave reflector 20 and diffraction grating 21 and then condensed onto the solid state scanning element 23 through a concave reflector 22. On the other hand, the wavelength reference beam sent from the laser is put into the element 23 via a similar route as above. The output of element 23 that is driven by the driving circuit 28 is stored in the memory 30 via the A/D converter 29, and the film thickness is then calculated by the computer 30. In such way, a quick and high-precision measurement is possible for a film thickness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5655480A JPS56153207A (en) | 1980-04-28 | 1980-04-28 | Measuring device for film thickness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5655480A JPS56153207A (en) | 1980-04-28 | 1980-04-28 | Measuring device for film thickness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56153207A true JPS56153207A (en) | 1981-11-27 |
Family
ID=13030321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5655480A Pending JPS56153207A (en) | 1980-04-28 | 1980-04-28 | Measuring device for film thickness |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56153207A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61217705A (en) * | 1985-03-22 | 1986-09-27 | Dainippon Screen Mfg Co Ltd | Film thickness measuring device |
| JPS62201304A (en) * | 1986-02-28 | 1987-09-05 | Canon Inc | Measuring method for film thickness |
| JPS6344106A (en) * | 1986-08-12 | 1988-02-25 | Canon Inc | Film thickness measuring method |
| US6670200B2 (en) | 1998-05-21 | 2003-12-30 | Nikon Corporation | Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same |
-
1980
- 1980-04-28 JP JP5655480A patent/JPS56153207A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61217705A (en) * | 1985-03-22 | 1986-09-27 | Dainippon Screen Mfg Co Ltd | Film thickness measuring device |
| JPS62201304A (en) * | 1986-02-28 | 1987-09-05 | Canon Inc | Measuring method for film thickness |
| JPS6344106A (en) * | 1986-08-12 | 1988-02-25 | Canon Inc | Film thickness measuring method |
| US6670200B2 (en) | 1998-05-21 | 2003-12-30 | Nikon Corporation | Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same |
| US7052920B2 (en) | 1998-05-21 | 2006-05-30 | Nikon Corporation | Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ES8402931A1 (en) | Optical inspection system | |
| DE68911659D1 (en) | Method for thin film thickness measurement. | |
| NO883924L (en) | OPTIONS FOR MEASURING CURVATION VARIATION. | |
| JPS6413403A (en) | Interference length measuring apparatus | |
| JPS56153207A (en) | Measuring device for film thickness | |
| JPS5752806A (en) | Method and device for measuring film thickness | |
| JPS5590984A (en) | Making method of multibranching hologram photo coupler | |
| JPS55142220A (en) | Device for measuring wavelength | |
| JPS5752807A (en) | Device for measuring film thickness | |
| JPS5767815A (en) | Measuring method for position of reflector using light | |
| JPS56130606A (en) | Optical measuring device for thickness of transparent material | |
| SU135256A1 (en) | Instrument for measuring the reflection coefficients of flat specular reflecting surfaces when normal light is incident on them | |
| JPS56111405A (en) | Method and device for measuring thickness of transparent film | |
| JPS5782723A (en) | Measuring device for oscillation | |
| SU1121605A1 (en) | Method of determination of angle between optical axis of single-axis crystal and entrance face thereof | |
| JPS55411A (en) | Surface roughness measurement with laser beam | |
| JPS56126813A (en) | Incident position detector of luminous flux | |
| JPS57130416A (en) | Apparatus for processing projecting substance | |
| JPS57181184A (en) | Laser oscillator | |
| JPS56103303A (en) | Optical measuring method for micro-gap | |
| JPS57113342A (en) | Eccentricity measurement | |
| JPS5497469A (en) | Laser speed measuring apparatus | |
| JPS57103008A (en) | Optical position detector | |
| JPS5299842A (en) | Measurement of wavelength dispersion | |
| SU909637A1 (en) | Device for interferometric measuring of surface displacement high speeds |