[go: up one dir, main page]

JPS56146268A - Manufacture of semiconductor memory unit - Google Patents

Manufacture of semiconductor memory unit

Info

Publication number
JPS56146268A
JPS56146268A JP4943780A JP4943780A JPS56146268A JP S56146268 A JPS56146268 A JP S56146268A JP 4943780 A JP4943780 A JP 4943780A JP 4943780 A JP4943780 A JP 4943780A JP S56146268 A JPS56146268 A JP S56146268A
Authority
JP
Japan
Prior art keywords
film
type rom
moreover
manufacture
fuse type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4943780A
Other languages
Japanese (ja)
Other versions
JPH0225263B2 (en
Inventor
Kiyoshi Miyasaka
Fumio Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4943780A priority Critical patent/JPS56146268A/en
Publication of JPS56146268A publication Critical patent/JPS56146268A/en
Publication of JPH0225263B2 publication Critical patent/JPH0225263B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
    • H01L23/556—Protection against radiation, e.g. light or electromagnetic waves against alpha rays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Read Only Memory (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)

Abstract

PURPOSE:To intercept alpha rays and to prevent the generation of soft error by a method wherein after selective burn off work of the fuse type ROM is finished, a resin film is formed to perform the protection. CONSTITUTION:A field oxide film 2, a gate oxide film 3 are formed on a p type silicon semiconductor substrate 1, and moreover a silicon gate electrode 4G, the fuse type ROM part 4R, and besides wiring are formed. Then n<+> type impurity regions 5S, 5D and a phosphosilicic acid glass film 6 are formed, electrodes 7G, 7SR, 7D, 7R, etc., are formed and moreover a phosphosilicic acid glass film 8 is formed. Then the burning off of the fuse type ROM part 4R is performed, and the polyimide resin film 9 is formed as the protective film.
JP4943780A 1980-04-15 1980-04-15 Manufacture of semiconductor memory unit Granted JPS56146268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4943780A JPS56146268A (en) 1980-04-15 1980-04-15 Manufacture of semiconductor memory unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4943780A JPS56146268A (en) 1980-04-15 1980-04-15 Manufacture of semiconductor memory unit

Publications (2)

Publication Number Publication Date
JPS56146268A true JPS56146268A (en) 1981-11-13
JPH0225263B2 JPH0225263B2 (en) 1990-06-01

Family

ID=12831077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4943780A Granted JPS56146268A (en) 1980-04-15 1980-04-15 Manufacture of semiconductor memory unit

Country Status (1)

Country Link
JP (1) JPS56146268A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58209030A (en) * 1982-05-28 1983-12-05 セイコーエプソン株式会社 Semiconductor fuse
JPS59117157A (en) * 1982-12-24 1984-07-06 Hitachi Ltd semiconductor equipment
JPS6065545A (en) * 1983-09-21 1985-04-15 Hitachi Micro Comput Eng Ltd Manufacturing method of semiconductor device
JPS60176250A (en) * 1984-02-23 1985-09-10 Toshiba Corp Manufacture of semiconductor device
JPS60210850A (en) * 1984-04-04 1985-10-23 Mitsubishi Electric Corp Method for manufacturing semiconductor integrated circuit device
JPS60261154A (en) * 1984-06-08 1985-12-24 Hitachi Micro Comput Eng Ltd Method for manufacturing semiconductor integrated circuit device
JPH0286139U (en) * 1988-12-21 1990-07-09
JPH07130860A (en) * 1994-01-31 1995-05-19 Hitachi Ltd Method for manufacturing semiconductor integrated circuit device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58209030A (en) * 1982-05-28 1983-12-05 セイコーエプソン株式会社 Semiconductor fuse
JPS59117157A (en) * 1982-12-24 1984-07-06 Hitachi Ltd semiconductor equipment
JPS6065545A (en) * 1983-09-21 1985-04-15 Hitachi Micro Comput Eng Ltd Manufacturing method of semiconductor device
JPS60176250A (en) * 1984-02-23 1985-09-10 Toshiba Corp Manufacture of semiconductor device
JPS60210850A (en) * 1984-04-04 1985-10-23 Mitsubishi Electric Corp Method for manufacturing semiconductor integrated circuit device
JPS60261154A (en) * 1984-06-08 1985-12-24 Hitachi Micro Comput Eng Ltd Method for manufacturing semiconductor integrated circuit device
JPH0286139U (en) * 1988-12-21 1990-07-09
JPH07130860A (en) * 1994-01-31 1995-05-19 Hitachi Ltd Method for manufacturing semiconductor integrated circuit device

Also Published As

Publication number Publication date
JPH0225263B2 (en) 1990-06-01

Similar Documents

Publication Publication Date Title
HK44286A (en) A semiconductor device and a process for producing the same
JPS56146268A (en) Manufacture of semiconductor memory unit
JPS56110263A (en) Thyristor element
JPS57188866A (en) Manufacture of semiconductor device
JPS55107267A (en) Manufacture of complementarity mos semiconductor device
JPS5740973A (en) Inverter circuit and manufacture therefor
SE8503834D0 (en) SET TO MANUFACTURE SOLAR CELLS
JPS5211776A (en) Method of manufacturing semiconductor device
JPS53108366A (en) Manufacture for semiconductor device
JPS5795681A (en) Impurity diffusion method of compound semiconductor
JPS56155566A (en) Manufacture of semiconductor device
JPS5591871A (en) Manufacture of semiconductor device
JPS6446974A (en) Manufacture of semiconductor device
JPS55162260A (en) Semiconductor ic device
JPS56157066A (en) Manufacture of semiconductor device
JPS5585070A (en) Preparation of semiconductor device
JPS55127055A (en) Manufacture of semiconductor device
JPS5591870A (en) Manufacture of semiconductor device
JPS5787123A (en) Manufacture of semiconductor device
JPS5588370A (en) Preparation of semiconductor memory device
JPS5712548A (en) Manufacture of complementary type mos semiconductor device
JPS5627939A (en) Manufacture of semiconductor device
JPS641258A (en) Manufacture of semiconductor device
JPS5218184A (en) Semiconductor device process
JPS55123171A (en) Manufacture of semiconductor device