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JPS56146083A - Vacuum exhaust system - Google Patents

Vacuum exhaust system

Info

Publication number
JPS56146083A
JPS56146083A JP4796780A JP4796780A JPS56146083A JP S56146083 A JPS56146083 A JP S56146083A JP 4796780 A JP4796780 A JP 4796780A JP 4796780 A JP4796780 A JP 4796780A JP S56146083 A JPS56146083 A JP S56146083A
Authority
JP
Japan
Prior art keywords
vacuum
low vacuum
valves
low
degree
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4796780A
Other languages
Japanese (ja)
Inventor
Eiichi Izumi
Yoshio Arima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4796780A priority Critical patent/JPS56146083A/en
Publication of JPS56146083A publication Critical patent/JPS56146083A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE: To decrease the number of low vacuum pumps rather than the number of vacuum chambers by a mechanism wherein reservors are mounted among high vacuum pumps and low vacuum valves, and means are installed which can alternately exhaust said reservoirs.
CONSTITUTION: Reservoirs 6 are connected to each exhaust passage among high vacuum pumps 3 and low vacuum valves 4 while only a low vacuum pump 5 is used, and the opening and closing of the low vacuum valves 4 are controlled by means of a valve opening and closing controller 7. Since the degree of vacuum of the reservoir 6b drops if the degree of vacuum of a vacuum chamber 1b drops for the exchange of samples, other low vacuum valves 4a, 4c, 4d are closed lest the degree of vacuum of the reservoir 6b should reach critical back pressure. The valve opening and closing controller 7 is set so as to be able to scan and open or selectively open the low vacuum valves 4.
COPYRIGHT: (C)1981,JPO&Japio
JP4796780A 1980-04-14 1980-04-14 Vacuum exhaust system Pending JPS56146083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4796780A JPS56146083A (en) 1980-04-14 1980-04-14 Vacuum exhaust system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4796780A JPS56146083A (en) 1980-04-14 1980-04-14 Vacuum exhaust system

Publications (1)

Publication Number Publication Date
JPS56146083A true JPS56146083A (en) 1981-11-13

Family

ID=12790091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4796780A Pending JPS56146083A (en) 1980-04-14 1980-04-14 Vacuum exhaust system

Country Status (1)

Country Link
JP (1) JPS56146083A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000053928A1 (en) * 1999-03-05 2000-09-14 Tokyo Electron Limited Vacuum device
JP2005207419A (en) * 2003-12-31 2005-08-04 Boc Group Inc:The Vacuum exhaust device
JP2007127048A (en) * 2005-11-04 2007-05-24 Ulvac Japan Ltd Vacuum exhaust device
JP2007263122A (en) * 1999-11-17 2007-10-11 Nabtesco Corp Vacuum exhaust device
JP2007298043A (en) * 1999-11-17 2007-11-15 Nabtesco Corp Vacuum exhaust device
KR100931135B1 (en) 2007-11-28 2009-12-10 한국원자력연구원 Vacuum system and its operation method
CN103228914A (en) * 2010-12-22 2013-07-31 株式会社爱发科 Evacuation device, vacuum processing device, and evacuation method
CN107676241A (en) * 2017-09-06 2018-02-09 清华大学 A kind of backing system and vacuumize control method
JP2020056373A (en) * 2018-10-03 2020-04-09 株式会社荏原製作所 Vacuum exhaust system
JP2022183192A (en) * 2018-08-08 2022-12-08 株式会社島津製作所 Vacuum valve, valve system, and controller and calibrator for valve system

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6736606B1 (en) 1999-03-05 2004-05-18 Tadahiro Ohmi Vacuum apparatus
US6896490B2 (en) 1999-03-05 2005-05-24 Tadahiro Ohmi Vacuum apparatus
WO2000053928A1 (en) * 1999-03-05 2000-09-14 Tokyo Electron Limited Vacuum device
JP2007263122A (en) * 1999-11-17 2007-10-11 Nabtesco Corp Vacuum exhaust device
JP2007298043A (en) * 1999-11-17 2007-11-15 Nabtesco Corp Vacuum exhaust device
JP2005207419A (en) * 2003-12-31 2005-08-04 Boc Group Inc:The Vacuum exhaust device
JP2007127048A (en) * 2005-11-04 2007-05-24 Ulvac Japan Ltd Vacuum exhaust device
KR100931135B1 (en) 2007-11-28 2009-12-10 한국원자력연구원 Vacuum system and its operation method
CN103228914A (en) * 2010-12-22 2013-07-31 株式会社爱发科 Evacuation device, vacuum processing device, and evacuation method
CN107676241A (en) * 2017-09-06 2018-02-09 清华大学 A kind of backing system and vacuumize control method
CN107676241B (en) * 2017-09-06 2019-03-22 清华大学 A kind of backing system and vacuumize control method
JP2022183192A (en) * 2018-08-08 2022-12-08 株式会社島津製作所 Vacuum valve, valve system, and controller and calibrator for valve system
JP2020056373A (en) * 2018-10-03 2020-04-09 株式会社荏原製作所 Vacuum exhaust system
CN110985884A (en) * 2018-10-03 2020-04-10 株式会社荏原制作所 Vacuum exhaust system
TWI814912B (en) * 2018-10-03 2023-09-11 日商荏原製作所股份有限公司 Exhaust method of vacuum evacuation system

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