Classifications

• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
  • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
  • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
  • G03F1/84—Inspecting
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
  • G01N21/84—Systems specially adapted for particular applications
  • G01N21/88—Investigating the presence of flaws or contamination
  • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
  • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Biochemistry (AREA)
• Life Sciences & Earth Sciences (AREA)
• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Health & Medical Sciences (AREA)
• General Health & Medical Sciences (AREA)
• Immunology (AREA)
• Pathology (AREA)
• Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
• Testing Or Measuring Of Semiconductors Or The Like (AREA)
• Preparing Plates And Mask In Photomechanical Process (AREA)
• Length Measuring Devices By Optical Means (AREA)
• Analysing Materials By The Use Of Radiation (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=5520612

Family Applications (1)

Country Status (6)

Cited By (2)

Families Citing this family (2)

Citations (1)

Family Cites Families (1)

• 1979
  • 1979-10-16 DD DD21623879A patent/DD146500A1/en not_active IP Right Cessation
• 1980
  • 1980-09-22 SU SU807771388A patent/SU1142733A1/en active
  • 1980-10-03 DE DE19803037467 patent/DE3037467A1/en not_active Withdrawn
  • 1980-10-10 FR FR8021700A patent/FR2468100A1/en active Granted
  • 1980-10-16 JP JP14373880A patent/JPS56142533A/en active Pending
  • 1980-10-16 GB GB8033396A patent/GB2060876B/en not_active Expired

Patent Citations (1)

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