JPS56134454A - Ion-producing system - Google Patents
Ion-producing systemInfo
- Publication number
- JPS56134454A JPS56134454A JP3757280A JP3757280A JPS56134454A JP S56134454 A JPS56134454 A JP S56134454A JP 3757280 A JP3757280 A JP 3757280A JP 3757280 A JP3757280 A JP 3757280A JP S56134454 A JPS56134454 A JP S56134454A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- current
- electric current
- electrode
- controlling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001276 controlling effect Effects 0.000 abstract 3
- 150000002500 ions Chemical class 0.000 abstract 2
- 230000000149 penetrating effect Effects 0.000 abstract 2
- 238000010884 ion-beam technique Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
- Particle Accelerators (AREA)
Abstract
PURPOSE:To enable the mean value of ionic kinetic energies of output beams to be greatly and easily controlled by providing a controlling electrode, and by regulating only ions. CONSTITUTION:A controlling electode 10 penetrating a hollow center 2 of an anode 1, is placed parallel to the magnetic field produced by a megnetic-field producing device 8, and is located apart from the center axis of the cylindrical hollow center 2. The electric potential of the controlling electrode 10 is maintained at a desired value of Vg by means of a D.C. power source 26, and thereby an electric current of Ig flows in the electrode 10. An electric potential of Va is given to the anode 1 by means of a D.C. power source 27 provided between the anode 1 and an earthing, and thereby an electric current of Ia flows in the anode 1. An electric current of Ik which is fed to cathodes 3 and 4 is earthed through a current-measuring device 25 which meansures the current, Ik. Ions produced by this system is taken out as ion beams from a penetrating hole 9.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55037572A JPS586258B2 (en) | 1980-03-26 | 1980-03-26 | ion generator |
| US06/245,534 US4423355A (en) | 1980-03-26 | 1981-03-19 | Ion generating apparatus |
| DE8181102209T DE3164277D1 (en) | 1980-03-26 | 1981-03-24 | Ion generating apparatus |
| EP81102209A EP0036665B1 (en) | 1980-03-26 | 1981-03-24 | Ion generating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55037572A JPS586258B2 (en) | 1980-03-26 | 1980-03-26 | ion generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56134454A true JPS56134454A (en) | 1981-10-21 |
| JPS586258B2 JPS586258B2 (en) | 1983-02-03 |
Family
ID=12501237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55037572A Expired JPS586258B2 (en) | 1980-03-26 | 1980-03-26 | ion generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS586258B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58117695A (en) * | 1982-01-05 | 1983-07-13 | 株式会社東芝 | Plasma device |
| JP2018170295A (en) * | 2018-08-08 | 2018-11-01 | 株式会社日立ハイテクノロジーズ | Ion gun, ion milling apparatus, and ion milling method |
-
1980
- 1980-03-26 JP JP55037572A patent/JPS586258B2/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58117695A (en) * | 1982-01-05 | 1983-07-13 | 株式会社東芝 | Plasma device |
| JPH0526320B2 (en) * | 1982-01-05 | 1993-04-15 | Tokyo Shibaura Electric Co | |
| JP2018170295A (en) * | 2018-08-08 | 2018-11-01 | 株式会社日立ハイテクノロジーズ | Ion gun, ion milling apparatus, and ion milling method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS586258B2 (en) | 1983-02-03 |
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