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JPS56115945A - Detecting device for defect of panel plate - Google Patents

Detecting device for defect of panel plate

Info

Publication number
JPS56115945A
JPS56115945A JP1777880A JP1777880A JPS56115945A JP S56115945 A JPS56115945 A JP S56115945A JP 1777880 A JP1777880 A JP 1777880A JP 1777880 A JP1777880 A JP 1777880A JP S56115945 A JPS56115945 A JP S56115945A
Authority
JP
Japan
Prior art keywords
defect
panel plate
back side
light
existing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1777880A
Other languages
Japanese (ja)
Other versions
JPS6312249B2 (en
Inventor
Kensaku Takahashi
Yasuo Hachikake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP1777880A priority Critical patent/JPS56115945A/en
Publication of JPS56115945A publication Critical patent/JPS56115945A/en
Publication of JPS6312249B2 publication Critical patent/JPS6312249B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To make it possible to discriminate effectively a defect existing on the surface and back side by utilizing the difference in the strength of the dispersed light produced in the surface or the backside when the laser beam is projected on a defect existing on the transparent panel plate. CONSTITUTION:The laser beam 2 of S type polarization from the laser light source 1 is projected vertically on the panel plate 5 by a vibration mirror 3 besides to be scanned in the X-axial direction. Also the panel plate 5 is shifted in the Y direction to complete the scanning of XY axes. The scattered light caused by a defect and the permeable light of the scattered light transmitting the panel plate is added to the photoelectric transducers 7 and 7' through the polarization plate 9 and the light receiving lens 6, the output signals thereof are put into a differential amplifier 10. In case a defect is existing on the back side, the polarized light S on the back side is increased, while the strength of the transmission light T on the surface side is weakend and by differentially detecting these the existing defect on the back side is discriminated. Thereby the defect on the surface or on the back side can be rationally discriminated thus to increase the yield of the panel plate production.
JP1777880A 1980-02-18 1980-02-18 Detecting device for defect of panel plate Granted JPS56115945A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1777880A JPS56115945A (en) 1980-02-18 1980-02-18 Detecting device for defect of panel plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1777880A JPS56115945A (en) 1980-02-18 1980-02-18 Detecting device for defect of panel plate

Publications (2)

Publication Number Publication Date
JPS56115945A true JPS56115945A (en) 1981-09-11
JPS6312249B2 JPS6312249B2 (en) 1988-03-18

Family

ID=11953169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1777880A Granted JPS56115945A (en) 1980-02-18 1980-02-18 Detecting device for defect of panel plate

Country Status (1)

Country Link
JP (1) JPS56115945A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5862544A (en) * 1981-10-09 1983-04-14 Nippon Kogaku Kk <Nikon> Device for checking foreign matter
JPS5879144A (en) * 1981-11-06 1983-05-12 Nippon Kogaku Kk <Nikon> Foreign substance detection device
JPS6312943A (en) * 1986-05-02 1988-01-20 パ−テイクル、メジユアリング、システムズ　インコ−ポレ−テツド Method and device for analyzing surface
JPH01151243A (en) * 1987-12-09 1989-06-14 Mitsui Mining & Smelting Co Ltd Measurement of defect distribution and apparatus therefor
JPH04143640A (en) * 1990-07-27 1992-05-18 Hitachi Ltd Foreign object inspection device
JPH04230837A (en) * 1991-04-26 1992-08-19 Hitachi Ltd Double-sided foreign object detection method and device
US5331396A (en) * 1991-10-08 1994-07-19 Matsushita Electric Industrial Co., Ltd. Foreign matter detection device
JP2002544477A (en) * 1999-05-11 2002-12-24 アプライド マテリアルズ インコーポレイテッド Inspection system that performs two-dimensional imaging with a line light spot
JP2003086103A (en) * 2001-09-13 2003-03-20 Matsushita Electric Ind Co Ltd Defect detection method of plasma display panel
JP2005180939A (en) * 2003-12-16 2005-07-07 Lasertec Corp Optical apparatus, inspection device and inspection method
JP2019045452A (en) * 2017-09-07 2019-03-22 株式会社住田光学ガラス Inspection device and method for inspection

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5862544A (en) * 1981-10-09 1983-04-14 Nippon Kogaku Kk <Nikon> Device for checking foreign matter
JPH0343581B2 (en) * 1981-10-09 1991-07-03 Nippon Kogaku Kk
JPS5879144A (en) * 1981-11-06 1983-05-12 Nippon Kogaku Kk <Nikon> Foreign substance detection device
JPH0427497B2 (en) * 1981-11-06 1992-05-12 Nippon Kogaku Kk
JPS6312943A (en) * 1986-05-02 1988-01-20 パ−テイクル、メジユアリング、システムズ　インコ−ポレ−テツド Method and device for analyzing surface
JPH01151243A (en) * 1987-12-09 1989-06-14 Mitsui Mining & Smelting Co Ltd Measurement of defect distribution and apparatus therefor
JPH04143640A (en) * 1990-07-27 1992-05-18 Hitachi Ltd Foreign object inspection device
JPH04230837A (en) * 1991-04-26 1992-08-19 Hitachi Ltd Double-sided foreign object detection method and device
US5331396A (en) * 1991-10-08 1994-07-19 Matsushita Electric Industrial Co., Ltd. Foreign matter detection device
JP2002544477A (en) * 1999-05-11 2002-12-24 アプライド マテリアルズ インコーポレイテッド Inspection system that performs two-dimensional imaging with a line light spot
JP2003086103A (en) * 2001-09-13 2003-03-20 Matsushita Electric Ind Co Ltd Defect detection method of plasma display panel
JP2005180939A (en) * 2003-12-16 2005-07-07 Lasertec Corp Optical apparatus, inspection device and inspection method
JP2019045452A (en) * 2017-09-07 2019-03-22 株式会社住田光学ガラス Inspection device and method for inspection

Also Published As

Publication number Publication date
JPS6312249B2 (en) 1988-03-18

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