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JPS56104177A - Cryopump using liquid nitrogen - Google Patents

Cryopump using liquid nitrogen

Info

Publication number
JPS56104177A
JPS56104177A JP657780A JP657780A JPS56104177A JP S56104177 A JPS56104177 A JP S56104177A JP 657780 A JP657780 A JP 657780A JP 657780 A JP657780 A JP 657780A JP S56104177 A JPS56104177 A JP S56104177A
Authority
JP
Japan
Prior art keywords
cryopump
refrigerating machine
condensing plate
heat exchanger
liquid nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP657780A
Other languages
Japanese (ja)
Inventor
Yoshio Tani
Yutaka Momose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd filed Critical Aisin Seiki Co Ltd
Priority to JP657780A priority Critical patent/JPS56104177A/en
Publication of JPS56104177A publication Critical patent/JPS56104177A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE: To equip a cryopump, having a condensing plate in thermal contact with an expansion cylinder, with a compact, single-stage refrigerating machine instead of a conventional one with larger capacity, by utilizing the latent heat of liquid nitrogen as refrigerating output for a thermal shielding panel.
CONSTITUTION: A vacuum tank 21 is equipped with a condensing plate 22, and circulating working gas of a refrigerating machine used in a cryopump is cooled by a heat exchanger 20 through which high pressure nitrogen gas discharged from a compressor 8 and returning to a high pressure valve 9 flows. The working gas is then cooled through a hot regenerator 24, heat exchanger 14 and cool regenerator 23, and expanded in an expansion space 4 of an expansion cylinder 1 to cool the condensing plate 22 to the order of 20k. Liquid nitrogen from a tank 17 also cools the heat exchanger 14, thermal shielding panel 16 and thermal anchor 15a and finally the compressor 8 while being evaporated for the most part. Cooling the condensing plate 22 with output of about 20K is sufficient for the refrigerating machine of cryopump, which means that the refrigerating machine used is compact, instead of a bulky and multistaged one for cooling other units.
COPYRIGHT: (C)1981,JPO&Japio
JP657780A 1980-01-23 1980-01-23 Cryopump using liquid nitrogen Pending JPS56104177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP657780A JPS56104177A (en) 1980-01-23 1980-01-23 Cryopump using liquid nitrogen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP657780A JPS56104177A (en) 1980-01-23 1980-01-23 Cryopump using liquid nitrogen

Publications (1)

Publication Number Publication Date
JPS56104177A true JPS56104177A (en) 1981-08-19

Family

ID=11642175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP657780A Pending JPS56104177A (en) 1980-01-23 1980-01-23 Cryopump using liquid nitrogen

Country Status (1)

Country Link
JP (1) JPS56104177A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050283A (en) * 1983-08-27 1985-03-19 Shimadzu Corp Cryo-pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050283A (en) * 1983-08-27 1985-03-19 Shimadzu Corp Cryo-pump
JPH0461196B2 (en) * 1983-08-27 1992-09-30 Shimadzu Corp

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