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JPS56102576A - Apparatus for vapor depositing strongly adhering hard carbon layer in large area - Google Patents

Apparatus for vapor depositing strongly adhering hard carbon layer in large area

Info

Publication number
JPS56102576A
JPS56102576A JP13680180A JP13680180A JPS56102576A JP S56102576 A JPS56102576 A JP S56102576A JP 13680180 A JP13680180 A JP 13680180A JP 13680180 A JP13680180 A JP 13680180A JP S56102576 A JPS56102576 A JP S56102576A
Authority
JP
Japan
Prior art keywords
large area
carbon layer
hard carbon
vapor depositing
strongly adhering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13680180A
Other languages
Japanese (ja)
Other versions
JPS5941509B2 (en
Inventor
Boringeru Herumuuto
Biyutsuken Berunto
Uiruberuku Riyuudeigeru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HOOHIBAAKUUMU DORESUDEN VEB
Original Assignee
HOOHIBAAKUUMU DORESUDEN VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HOOHIBAAKUUMU DORESUDEN VEB filed Critical HOOHIBAAKUUMU DORESUDEN VEB
Publication of JPS56102576A publication Critical patent/JPS56102576A/en
Publication of JPS5941509B2 publication Critical patent/JPS5941509B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
JP13680180A 1979-10-02 1980-10-02 Equipment for depositing highly adhesive, particularly hard carbon layers over large areas Expired JPS5941509B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD21595179A DD146307A1 (en) 1979-10-02 1979-10-02 DEVICE FOR LARGE LAYER-RELATED DEPOSITION, IN PARTICULAR OF CARBON LAYERS
DD23G/21595 1979-10-02

Publications (2)

Publication Number Publication Date
JPS56102576A true JPS56102576A (en) 1981-08-17
JPS5941509B2 JPS5941509B2 (en) 1984-10-08

Family

ID=5520396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13680180A Expired JPS5941509B2 (en) 1979-10-02 1980-10-02 Equipment for depositing highly adhesive, particularly hard carbon layers over large areas

Country Status (4)

Country Link
JP (1) JPS5941509B2 (en)
CH (1) CH653708A5 (en)
DD (1) DD146307A1 (en)
DE (1) DE3030454C2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0560537U (en) * 1992-01-22 1993-08-10 弘 小川 Garbage Disposal Equipment for Kitchen
US6882389B2 (en) 1990-03-23 2005-04-19 Matsushita Electric Industrial Co., Ltd. Transflective LCD device with different transmission parts each having a particular transmittance
KR100769882B1 (en) 2005-10-03 2007-10-24 추부 니혼 마루코 컴퍼니 리미티드 Contactless connector

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4504519A (en) * 1981-10-21 1985-03-12 Rca Corporation Diamond-like film and process for producing same
DE3246361A1 (en) * 1982-02-27 1983-09-08 Philips Patentverwaltung Gmbh, 2000 Hamburg CARBON-CONTAINING SLIP LAYER

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6882389B2 (en) 1990-03-23 2005-04-19 Matsushita Electric Industrial Co., Ltd. Transflective LCD device with different transmission parts each having a particular transmittance
US6909483B2 (en) 1990-03-23 2005-06-21 Matsushita Electric Industrial Co., Ltd. Transflective LCD device with different transmission parts each having a particular transmittance
US6952248B2 (en) 1990-03-23 2005-10-04 Matsushita Electric Industrial Co., Ltd. Data processing apparatus
US6990595B2 (en) 1990-03-23 2006-01-24 Matsushita Electric Industrial Co., Ltd. Data processing apparatus
US7006181B2 (en) 1990-03-23 2006-02-28 Matsushita Electric Industrial Co., Ltd. Data processing apparatus
US7024572B2 (en) 1990-03-23 2006-04-04 Matsushita Electric Industrial Co., Ltd. Data processing apparatus
US7079108B2 (en) 1990-03-23 2006-07-18 Matsushita Electric Industrial Co., Ltd. Data processing apparatus
US7120809B2 (en) 1990-03-23 2006-10-10 Matsushita Electric Industrial Co., Ltd. Data processing apparatus
US7821489B2 (en) 1990-03-23 2010-10-26 Panasonic Corporation Data processing apparatus
JPH0560537U (en) * 1992-01-22 1993-08-10 弘 小川 Garbage Disposal Equipment for Kitchen
KR100769882B1 (en) 2005-10-03 2007-10-24 추부 니혼 마루코 컴퍼니 리미티드 Contactless connector

Also Published As

Publication number Publication date
DD146307A1 (en) 1981-02-04
JPS5941509B2 (en) 1984-10-08
DE3030454C2 (en) 1987-04-02
DE3030454A1 (en) 1981-04-16
CH653708A5 (en) 1986-01-15

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