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JPS56101190U - - Google Patents

Info

Publication number
JPS56101190U
JPS56101190U JP18487379U JP18487379U JPS56101190U JP S56101190 U JPS56101190 U JP S56101190U JP 18487379 U JP18487379 U JP 18487379U JP 18487379 U JP18487379 U JP 18487379U JP S56101190 U JPS56101190 U JP S56101190U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18487379U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18487379U priority Critical patent/JPS56101190U/ja
Publication of JPS56101190U publication Critical patent/JPS56101190U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
  • Railway Tracks (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Non-Mechanical Conveyors (AREA)
JP18487379U 1979-12-29 1979-12-29 Pending JPS56101190U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18487379U JPS56101190U (en) 1979-12-29 1979-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18487379U JPS56101190U (en) 1979-12-29 1979-12-29

Publications (1)

Publication Number Publication Date
JPS56101190U true JPS56101190U (en) 1981-08-08

Family

ID=29695081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18487379U Pending JPS56101190U (en) 1979-12-29 1979-12-29

Country Status (1)

Country Link
JP (1) JPS56101190U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009038917A (en) * 2007-08-02 2009-02-19 Hitachi Metals Ltd Linear stage
JP2009296762A (en) * 2008-06-04 2009-12-17 Hitachi High-Tech Instruments Co Ltd Drive stage and chip mounter using the stage
JP2010539878A (en) * 2007-09-20 2010-12-16 フェスト アーゲー ウント コー カーゲー Direct drive linear electromagnetic drive device comprising a stator having two guide rails for linearly guiding the drive carriage
JP2011055704A (en) * 2010-12-01 2011-03-17 Hitachi High-Tech Instruments Co Ltd Driving stage

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009038917A (en) * 2007-08-02 2009-02-19 Hitachi Metals Ltd Linear stage
JP2010539878A (en) * 2007-09-20 2010-12-16 フェスト アーゲー ウント コー カーゲー Direct drive linear electromagnetic drive device comprising a stator having two guide rails for linearly guiding the drive carriage
JP2009296762A (en) * 2008-06-04 2009-12-17 Hitachi High-Tech Instruments Co Ltd Drive stage and chip mounter using the stage
JP4643685B2 (en) * 2008-06-04 2011-03-02 株式会社日立ハイテクインスツルメンツ Driving stage and chip mounter using the same
KR101116928B1 (en) * 2008-06-04 2012-03-12 가부시끼가이샤 히다찌 하이테크 인스트루먼츠 Driving stage and chip mounter using the same
JP2011055704A (en) * 2010-12-01 2011-03-17 Hitachi High-Tech Instruments Co Ltd Driving stage

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