JPS5598191U - - Google Patents

Info

Publication number: JPS5598191U
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP18210378U

Other languages

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-12-27

Filing date

1978-12-27

Publication date

1980-07-08

1978-12-27 Application filed filed Critical

1978-12-27 Priority to JP18210378U priority Critical patent/JPS5598191U/ja

1980-07-08 Publication of JPS5598191U publication Critical patent/JPS5598191U/ja

Status Pending legal-status Critical Current

Landscapes

Linear Motors (AREA)

JP18210378U 1978-12-27 1978-12-27 Pending JPS5598191U (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP18210378U JPS5598191U (en)	1978-12-27	1978-12-27

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP18210378U JPS5598191U (en)	1978-12-27	1978-12-27

Publications (1)

Publication Number	Publication Date
JPS5598191U true JPS5598191U (en)	1980-07-08

Family

ID=29193788

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP18210378U Pending JPS5598191U (en)	1978-12-27	1978-12-27

Country Status (1)

Country	Link
JP (1)	JPS5598191U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2000036734A1 (en) *	1998-12-16	2000-06-22	Nikon Corporation	Flat motor device and assembly method thereof, flat motor device driving method, stage device and driving method thereof, exposure system and exposure method, and device and production method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4836611A (en) *	1971-09-08	1973-05-30

1978
- 1978-12-27 JP JP18210378U patent/JPS5598191U/ja active Pending

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4836611A (en) *	1971-09-08	1973-05-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2000036734A1 (en) *	1998-12-16	2000-06-22	Nikon Corporation	Flat motor device and assembly method thereof, flat motor device driving method, stage device and driving method thereof, exposure system and exposure method, and device and production method thereof

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JPS5598191U - - Google Patents

Info

Links

Landscapes

Priority Applications (1)

Applications Claiming Priority (1)

Publications (1)

Family

ID=29193788

Family Applications (1)

Country Status (1)

Cited By (1)

Citations (1)

Patent Citations (1)

Cited By (1)

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