JPS559407A - Sampling table for scanning electron microscope etc - Google Patents
Sampling table for scanning electron microscope etcInfo
- Publication number
- JPS559407A JPS559407A JP8101378A JP8101378A JPS559407A JP S559407 A JPS559407 A JP S559407A JP 8101378 A JP8101378 A JP 8101378A JP 8101378 A JP8101378 A JP 8101378A JP S559407 A JPS559407 A JP S559407A
- Authority
- JP
- Japan
- Prior art keywords
- sampling table
- probes
- holders
- electron microscope
- scanning electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To observe a surface potential image of an unbonded IC by providing several holders which are electrically insulated from a sampling table, and installing contacting probes to the holders on the sampling table, then applying voltage to the probes.
CONSTITUTION: A wafer consisting of an IC 2 is placed on the center of a sampling table 1, and through insulators 6, several holders 4 with contacting probes 3 attached to them are fixed on the periphery of the sampling table 1. The edges of these probes 3 are brought into contact with the edge of the IC 2, and voltage is applied through lead wires 5 which are connected to the holders 4. When the IC 2 is two-dimensionally scanned by means of an electron beam, signals being emitted from the IC 2 are shown on a CRT. By so doing, a surface potential image can be observed during manufacturing process before bonding the IC, thus enabling the analysis on the products and selection of good products. Therefore, manufacturing efficiency of the IC can be increased.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8101378A JPS559407A (en) | 1978-07-05 | 1978-07-05 | Sampling table for scanning electron microscope etc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8101378A JPS559407A (en) | 1978-07-05 | 1978-07-05 | Sampling table for scanning electron microscope etc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS559407A true JPS559407A (en) | 1980-01-23 |
Family
ID=13734607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8101378A Pending JPS559407A (en) | 1978-07-05 | 1978-07-05 | Sampling table for scanning electron microscope etc |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS559407A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001063660A1 (en) * | 2000-02-25 | 2001-08-30 | Hitachi, Ltd. | Apparatus for detecting defect in device and method of detecting defect |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52113170A (en) * | 1977-03-25 | 1977-09-22 | Hitachi Ltd | Spicemen carrier for ic |
-
1978
- 1978-07-05 JP JP8101378A patent/JPS559407A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52113170A (en) * | 1977-03-25 | 1977-09-22 | Hitachi Ltd | Spicemen carrier for ic |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001063660A1 (en) * | 2000-02-25 | 2001-08-30 | Hitachi, Ltd. | Apparatus for detecting defect in device and method of detecting defect |
| US6734687B1 (en) | 2000-02-25 | 2004-05-11 | Hitachi, Ltd. | Apparatus for detecting defect in device and method of detecting defect |
| US6970004B2 (en) | 2000-02-25 | 2005-11-29 | Hitachi, Ltd. | Apparatus for inspecting defects of devices and method of inspecting defects |
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