JPS558019A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS558019A JPS558019A JP7965078A JP7965078A JPS558019A JP S558019 A JPS558019 A JP S558019A JP 7965078 A JP7965078 A JP 7965078A JP 7965078 A JP7965078 A JP 7965078A JP S558019 A JPS558019 A JP S558019A
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- impurity concentration
- epi
- layer
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To prevent quality variation of Si base plate of large area by forming on the Si base plate an epi-layer of the same type of electroconductivity and of 2-fold concentration or more.
CONSTITUTION: A uniform N epi-layer 2 with impurity concentration of 1015cm-3 is formed on an N type Si base plate 1 with impurity concentration of 5×1014cm-3, and when thus prepared material is used as a base plate, variation or fluctuation of impurity concentration of the base plate becomes controlled within a fixed range of 15% or less almost irrespectively of area of the base plate.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7965078A JPS558019A (en) | 1978-06-30 | 1978-06-30 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7965078A JPS558019A (en) | 1978-06-30 | 1978-06-30 | Semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS558019A true JPS558019A (en) | 1980-01-21 |
Family
ID=13695991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7965078A Pending JPS558019A (en) | 1978-06-30 | 1978-06-30 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS558019A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS572209A (en) * | 1980-06-04 | 1982-01-07 | G C Dental Ind Corp | Dental cement curing solution containing acrylic acid-maleic acid copolymer |
| JPS572210A (en) * | 1980-06-04 | 1982-01-07 | G C Dental Ind Corp | Dental cement curing solution containing fluoro complex salt |
| JPS5762211A (en) * | 1973-08-21 | 1982-04-15 | Nat Res Dev | Liquid ingredient for poly(carboxylate) cement |
| US7488762B2 (en) | 2005-04-25 | 2009-02-10 | Kabushiki Kaisha Shofu | Two paste-type glass ionomer cement |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS503585A (en) * | 1973-04-12 | 1975-01-14 | ||
| JPS50139678A (en) * | 1974-04-15 | 1975-11-08 |
-
1978
- 1978-06-30 JP JP7965078A patent/JPS558019A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS503585A (en) * | 1973-04-12 | 1975-01-14 | ||
| JPS50139678A (en) * | 1974-04-15 | 1975-11-08 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5762211A (en) * | 1973-08-21 | 1982-04-15 | Nat Res Dev | Liquid ingredient for poly(carboxylate) cement |
| JPS6150989B2 (en) * | 1973-08-21 | 1986-11-06 | Nat Res Dev | |
| JPS572209A (en) * | 1980-06-04 | 1982-01-07 | G C Dental Ind Corp | Dental cement curing solution containing acrylic acid-maleic acid copolymer |
| JPS572210A (en) * | 1980-06-04 | 1982-01-07 | G C Dental Ind Corp | Dental cement curing solution containing fluoro complex salt |
| JPS5938926B2 (en) * | 1980-06-04 | 1984-09-20 | 而至歯科工業株式会社 | Dental glass ionomer cement curing liquid containing fluoro complex salts |
| JPS5946924B2 (en) * | 1980-06-04 | 1984-11-15 | 而至歯科工業株式会社 | Dental glass ionomer cement curing liquid using acrylic acid/maleic acid copolymer |
| US7488762B2 (en) | 2005-04-25 | 2009-02-10 | Kabushiki Kaisha Shofu | Two paste-type glass ionomer cement |
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