JPS5551347A - Moisture-sensitive element - Google Patents
Moisture-sensitive elementInfo
- Publication number
- JPS5551347A JPS5551347A JP12589278A JP12589278A JPS5551347A JP S5551347 A JPS5551347 A JP S5551347A JP 12589278 A JP12589278 A JP 12589278A JP 12589278 A JP12589278 A JP 12589278A JP S5551347 A JPS5551347 A JP S5551347A
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- substrate
- microporous filter
- sensitive element
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920000642 polymer Polymers 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 abstract 2
- 125000002091 cationic group Chemical group 0.000 abstract 2
- 239000000178 monomer Substances 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 235000019270 ammonium chloride Nutrition 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
- 239000012798 spherical particle Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To secure the steady operation for a long time even in the harmful atmosphere by using the high molecular polymer containing the reactive cationic monomer for the moisture-sensitive element and then covering over the moisture- sensitive area with the microporous filter.
CONSTITUTION: The polymer of the cationic monomer such as the 2-hydroxy 3- methacrylic oxypropyl trimetly ammonium chloride is used for the moisture-sensitive element. The microporous filter is obtained by forming the equi-diameter and genuine spherical particle of the AS resin or the like into the cylindrical form. The thin film is formed on alumina substrate 2 by coating the above mentioned polymer solution and then burnt after drying to form moisture-sensitive part 4. Comb-line type electrodes 1 and 1 are installed in opposition to substrate 2, and them lead wire 3 is connected to electrodes 1 and 1. Then microporous filter 5 is provided on substrate 6 as if it covered over part 4. As filter 5 does not transmit the harmful gas, the steady operation is ensured for a long time at part 4.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12589278A JPS5551347A (en) | 1978-10-12 | 1978-10-12 | Moisture-sensitive element |
| DE19792920808 DE2920808C2 (en) | 1978-05-25 | 1979-05-22 | Sensor and circuit for humidity measurement |
| GB7918462A GB2025622B (en) | 1978-05-25 | 1979-05-25 | Humidity sensor and a humidity detection circuit |
| CH489079A CH641566A5 (en) | 1978-05-25 | 1979-05-25 | HUMIDITY PROBE AND THEIR USE IN A MEASURING ARRANGEMENT. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12589278A JPS5551347A (en) | 1978-10-12 | 1978-10-12 | Moisture-sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5551347A true JPS5551347A (en) | 1980-04-15 |
| JPS6212470B2 JPS6212470B2 (en) | 1987-03-18 |
Family
ID=14921491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12589278A Granted JPS5551347A (en) | 1978-05-25 | 1978-10-12 | Moisture-sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5551347A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4441073A (en) * | 1980-12-22 | 1984-04-03 | Electric Power Research Institute, Inc. | Resistivity sensor system for detecting faults in sealed gas-insulated electrical apparatus |
| JPS62180257A (en) * | 1986-02-05 | 1987-08-07 | Nippon Cement Co Ltd | Humidity sensor |
| JPH02278866A (en) * | 1989-04-20 | 1990-11-15 | Sanyo Electric Co Ltd | Semiconductor device and manufacture thereof |
-
1978
- 1978-10-12 JP JP12589278A patent/JPS5551347A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4441073A (en) * | 1980-12-22 | 1984-04-03 | Electric Power Research Institute, Inc. | Resistivity sensor system for detecting faults in sealed gas-insulated electrical apparatus |
| JPS62180257A (en) * | 1986-02-05 | 1987-08-07 | Nippon Cement Co Ltd | Humidity sensor |
| JPH02278866A (en) * | 1989-04-20 | 1990-11-15 | Sanyo Electric Co Ltd | Semiconductor device and manufacture thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6212470B2 (en) | 1987-03-18 |
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