JPS5551305A - Thickness measuring device for metal or metal oxide coat applied on surface of glass or the like - Google Patents
Thickness measuring device for metal or metal oxide coat applied on surface of glass or the likeInfo
- Publication number
- JPS5551305A JPS5551305A JP12439378A JP12439378A JPS5551305A JP S5551305 A JPS5551305 A JP S5551305A JP 12439378 A JP12439378 A JP 12439378A JP 12439378 A JP12439378 A JP 12439378A JP S5551305 A JPS5551305 A JP S5551305A
- Authority
- JP
- Japan
- Prior art keywords
- coat
- glass
- metal
- sno
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title abstract 4
- 239000002184 metal Substances 0.000 title abstract 2
- 229910044991 metal oxide Inorganic materials 0.000 title abstract 2
- 150000004706 metal oxides Chemical class 0.000 title abstract 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract 6
- 239000000758 substrate Substances 0.000 abstract 2
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To realize the on-line measurement for the thickness of the coat by erasing the reflection light given from the surface of the substrate such as the glass or the like by means of the Brewster's law and then detecting the amount of the reflection amount from the surface of the metal or metal oxide coat.
CONSTITUTION: Glass bottle 1 having the coat of SnO2 applied on its surface is transferred to the detection position to be turned there. The laser beam sent from laser oscillator 4 is turned into the linear polarized light parallel to the incident surface via polarizing plate 5 and then converted into the intermittent light of a fixed frequency through chopper 7 to be projected with Brewster angle θ. In this instant, the projection light is never reflected from the substrate surface of the glass or the like but reflected on the surface of the SnO2 coat to cause the output at the output of photoelectric conversion means 10. This output features the fixed relation to the thickness of the SnO2 coat. Thus utilizing this relation, the thickness can be measured for the coat in a lot and through the on-line method.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12439378A JPS608726B2 (en) | 1978-10-09 | 1978-10-09 | Device for measuring the thickness of metal or metal oxide coatings applied to the surface of glass, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12439378A JPS608726B2 (en) | 1978-10-09 | 1978-10-09 | Device for measuring the thickness of metal or metal oxide coatings applied to the surface of glass, etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5551305A true JPS5551305A (en) | 1980-04-15 |
| JPS608726B2 JPS608726B2 (en) | 1985-03-05 |
Family
ID=14884306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12439378A Expired JPS608726B2 (en) | 1978-10-09 | 1978-10-09 | Device for measuring the thickness of metal or metal oxide coatings applied to the surface of glass, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS608726B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62293103A (en) * | 1986-06-12 | 1987-12-19 | Nikon Corp | Surface displacement measuring instrument |
| JPH02140604A (en) * | 1988-03-14 | 1990-05-30 | Nanometrics Inc | Method and apparatus for measuring thickness of thin insulating film |
| WO1997000423A1 (en) * | 1995-06-14 | 1997-01-03 | Kirin Beer Kabushiki Kaisha | Apparatus and method for inspecting coating film |
| JP2014122832A (en) * | 2012-12-21 | 2014-07-03 | Nihon Yamamura Glass Co Ltd | Film thickness measurement device and film thickness inspection device for metal oxide coat |
-
1978
- 1978-10-09 JP JP12439378A patent/JPS608726B2/en not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62293103A (en) * | 1986-06-12 | 1987-12-19 | Nikon Corp | Surface displacement measuring instrument |
| JPH02140604A (en) * | 1988-03-14 | 1990-05-30 | Nanometrics Inc | Method and apparatus for measuring thickness of thin insulating film |
| WO1997000423A1 (en) * | 1995-06-14 | 1997-01-03 | Kirin Beer Kabushiki Kaisha | Apparatus and method for inspecting coating film |
| JP2014122832A (en) * | 2012-12-21 | 2014-07-03 | Nihon Yamamura Glass Co Ltd | Film thickness measurement device and film thickness inspection device for metal oxide coat |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS608726B2 (en) | 1985-03-05 |
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