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JPS5546162A - Energy analyzer - Google Patents

Energy analyzer

Info

Publication number
JPS5546162A
JPS5546162A JP11994278A JP11994278A JPS5546162A JP S5546162 A JPS5546162 A JP S5546162A JP 11994278 A JP11994278 A JP 11994278A JP 11994278 A JP11994278 A JP 11994278A JP S5546162 A JPS5546162 A JP S5546162A
Authority
JP
Japan
Prior art keywords
magnetic field
coil
fed
electron rays
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11994278A
Other languages
Japanese (ja)
Other versions
JPS626302B2 (en
Inventor
Akira Shirakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP11994278A priority Critical patent/JPS5546162A/en
Publication of JPS5546162A publication Critical patent/JPS5546162A/en
Publication of JPS626302B2 publication Critical patent/JPS626302B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To increase the resolution, by producing the magnetic field operated on the electron rays through the use of a plurality of coils, in the element analysis on test piece. CONSTITUTION:The electron rays from the electron gun 1 passed through the test piece 3 are fed to the magnetic field formed with the electromagnetic coil 5, and the energy spectrum of the electron rays is detected 7 by changing the strength of magnetic field. In this case, a given current is fed to the constant magnetic field producing coil 5A via the amplifier 10 from the current source 11 to form the magnetic field, and the scanning current changed in digital step from the pulse oscillator 14 is fed to the variable magnetic field production coil 5B via the A/D converter 12 and amplifier 13. Futher, the number of turns of the coil 5B is taken as 1/a of the coil 5A and the current flowing to the coil 5B is multiplied by 5. As a result, the resolution in the analysis can be increased.
JP11994278A 1978-09-29 1978-09-29 Energy analyzer Granted JPS5546162A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11994278A JPS5546162A (en) 1978-09-29 1978-09-29 Energy analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11994278A JPS5546162A (en) 1978-09-29 1978-09-29 Energy analyzer

Publications (2)

Publication Number Publication Date
JPS5546162A true JPS5546162A (en) 1980-03-31
JPS626302B2 JPS626302B2 (en) 1987-02-10

Family

ID=14773979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11994278A Granted JPS5546162A (en) 1978-09-29 1978-09-29 Energy analyzer

Country Status (1)

Country Link
JP (1) JPS5546162A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60189857A (en) * 1984-03-10 1985-09-27 Jeol Ltd Energy analysis equipment for electron microscopes, etc.
US6248267B1 (en) 1996-03-06 2001-06-19 Mitsubishi Rayon Co., Ltd. Method for manufacturing fibril system fiber

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60189857A (en) * 1984-03-10 1985-09-27 Jeol Ltd Energy analysis equipment for electron microscopes, etc.
US6248267B1 (en) 1996-03-06 2001-06-19 Mitsubishi Rayon Co., Ltd. Method for manufacturing fibril system fiber

Also Published As

Publication number Publication date
JPS626302B2 (en) 1987-02-10

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