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JPS5536921A - Pressure sensitive element - Google Patents

Pressure sensitive element

Info

Publication number
JPS5536921A
JPS5536921A JP10832478A JP10832478A JPS5536921A JP S5536921 A JPS5536921 A JP S5536921A JP 10832478 A JP10832478 A JP 10832478A JP 10832478 A JP10832478 A JP 10832478A JP S5536921 A JPS5536921 A JP S5536921A
Authority
JP
Japan
Prior art keywords
resistance layer
change
pressure
resistance
correlation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10832478A
Other languages
Japanese (ja)
Inventor
Hiroyuki Naito
Masami Tanitsu
Hiroshi Idekawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10832478A priority Critical patent/JPS5536921A/en
Publication of JPS5536921A publication Critical patent/JPS5536921A/en
Pending legal-status Critical Current

Links

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  • Pressure Sensors (AREA)

Abstract

PURPOSE: To measure pressure for change in high precision according to a simple constitution by arranging such that a resistance layer inductive to a change in pressure and another resistance layer not inductive thereto are formed on one pressure sensitive element itself, thereby keeping correlation between both the resistance layers constant at all times against any environmental change other than pressure.
CONSTITUTION: An arrangement is such that the value of a resistance layer 2a will be increased and that of another resistance layer 2b decreased from forming the resistance layers 2a, 2b of an inductive portion in the upward direction 110 on a water 1 face of silicone single crystal 001. And the value of a resistance layer 3 is kept from changing despite change in pressure from forming the resistance layer 3 on non-sensitive portion in the direction 010. From forming resistance layers 2a, 2b and 3 on the same wafer face 1, a correlation between resistance values will be kept always constant against environmental change due to temperature; and from a consitution of a simple bridge circuit with the correlation as a different one, pressur can be measured for change in high precision.
COPYRIGHT: (C)1980,JPO&Japio
JP10832478A 1978-09-04 1978-09-04 Pressure sensitive element Pending JPS5536921A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10832478A JPS5536921A (en) 1978-09-04 1978-09-04 Pressure sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10832478A JPS5536921A (en) 1978-09-04 1978-09-04 Pressure sensitive element

Publications (1)

Publication Number Publication Date
JPS5536921A true JPS5536921A (en) 1980-03-14

Family

ID=14481810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10832478A Pending JPS5536921A (en) 1978-09-04 1978-09-04 Pressure sensitive element

Country Status (1)

Country Link
JP (1) JPS5536921A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572131A (en) * 1983-06-13 1986-02-25 Kabushiki Kaisha Komatsu Seisakusho Governor device of diesel engine
JPS6187096A (en) * 1984-10-05 1986-05-02 日本鋼管株式会社 Method and apparatus for detecting collapse of face of shield type tunnel drilling machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572131A (en) * 1983-06-13 1986-02-25 Kabushiki Kaisha Komatsu Seisakusho Governor device of diesel engine
JPS6187096A (en) * 1984-10-05 1986-05-02 日本鋼管株式会社 Method and apparatus for detecting collapse of face of shield type tunnel drilling machine

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