JPS552898B2 - - Google Patents
Info
- Publication number
- JPS552898B2 JPS552898B2 JP8826875A JP8826875A JPS552898B2 JP S552898 B2 JPS552898 B2 JP S552898B2 JP 8826875 A JP8826875 A JP 8826875A JP 8826875 A JP8826875 A JP 8826875A JP S552898 B2 JPS552898 B2 JP S552898B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8826875A JPS5212591A (en) | 1975-07-21 | 1975-07-21 | Production method of semiconductor pressure coerter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8826875A JPS5212591A (en) | 1975-07-21 | 1975-07-21 | Production method of semiconductor pressure coerter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5212591A JPS5212591A (en) | 1977-01-31 |
| JPS552898B2 true JPS552898B2 (en) | 1980-01-22 |
Family
ID=13938134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8826875A Granted JPS5212591A (en) | 1975-07-21 | 1975-07-21 | Production method of semiconductor pressure coerter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5212591A (en) |
-
1975
- 1975-07-21 JP JP8826875A patent/JPS5212591A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5212591A (en) | 1977-01-31 |