JPS5528230A - Device for contracting thin film for electron microscope or the like - Google Patents
Device for contracting thin film for electron microscope or the likeInfo
- Publication number
- JPS5528230A JPS5528230A JP10047278A JP10047278A JPS5528230A JP S5528230 A JPS5528230 A JP S5528230A JP 10047278 A JP10047278 A JP 10047278A JP 10047278 A JP10047278 A JP 10047278A JP S5528230 A JPS5528230 A JP S5528230A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- retainer
- thermal expansion
- retainers
- expansion coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title abstract 6
- 238000010438 heat treatment Methods 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 229910000906 Bronze Inorganic materials 0.000 abstract 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- 239000010974 bronze Substances 0.000 abstract 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 229910001220 stainless steel Inorganic materials 0.000 abstract 1
- 239000010935 stainless steel Substances 0.000 abstract 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: To prevent a thin film from deforming at energizing heating time in an electron microscope or the like by retaining contracted thin film by long and short retainers and allowing the retainers to become different thermal expansion coefficient.
CONSTITUTION: A thin film 11 is secured at one end thereof via screws 12 to first retainer 13 and at the other via screws 14 to second retainer 15. The first retainer 13 is formed longer than the second retainer 15 in a manner that both the retainers are integrally fixed via screws 17, 18 through an insulator 16 at the position sufficiently spaced from the fixing point of the thin film 11. The first reatiner 13 employs metal such as stainless steel having large thermal expansion coefficient, and the second retainer 15 employs metal such as phosphor bronze having small thermal expansion coefficient. Thus, it can prevent the thin film 11 from deforming due to thermal expansion at energizing heating time.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10047278A JPS5528230A (en) | 1978-08-18 | 1978-08-18 | Device for contracting thin film for electron microscope or the like |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10047278A JPS5528230A (en) | 1978-08-18 | 1978-08-18 | Device for contracting thin film for electron microscope or the like |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5528230A true JPS5528230A (en) | 1980-02-28 |
Family
ID=14274843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10047278A Pending JPS5528230A (en) | 1978-08-18 | 1978-08-18 | Device for contracting thin film for electron microscope or the like |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5528230A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6871826B2 (en) | 2001-03-29 | 2005-03-29 | Nix, Inc. | Equipment adjusting leg |
-
1978
- 1978-08-18 JP JP10047278A patent/JPS5528230A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6871826B2 (en) | 2001-03-29 | 2005-03-29 | Nix, Inc. | Equipment adjusting leg |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57145982A (en) | Target for sputtering device | |
JPS5398781A (en) | Electron ray exposure unit | |
JPS5528230A (en) | Device for contracting thin film for electron microscope or the like | |
JPS5419249A (en) | Heat insulating device | |
JPS51115766A (en) | Non-varorized getter material | |
JPS5216171A (en) | Mask fitting device | |
JPS51128824A (en) | Aluminum or aluminum alloy sash fixing method | |
JPS5429153A (en) | Tube with fins | |
JPS53123668A (en) | Generator for semiconuctor oxidized film | |
JPS55105269A (en) | Developing device | |
JPS51133821A (en) | Unit grating of rain pipe | |
JPS5376668A (en) | X-ray exposure method | |
JPS5375560A (en) | Helical coil type intermediate heat exchanger | |
JPS5376441A (en) | Specimen heating device | |
JPS5329136A (en) | Fixing device | |
JPS51133651A (en) | Bearing device | |
JPS5285601A (en) | Supporting device for furnace wall outer filler material | |
JPS51136278A (en) | Non-spot aberration compensator for electron microscope having electri c field radiation gun | |
JPS51137123A (en) | Structure to support piping | |
JPS5220007A (en) | Locating method | |
JPS52106268A (en) | Scanning type electronic microscope and its method | |
JPS5234664A (en) | Image filming device for electron microscope | |
JPS5321950A (en) | Detection of position | |
JPS51144171A (en) | Position indicator for electron microscope | |
JPS5366744A (en) | Heat pipe |