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JPS55155866U - - Google Patents

Info

Publication number
JPS55155866U
JPS55155866U JP5213079U JP5213079U JPS55155866U JP S55155866 U JPS55155866 U JP S55155866U JP 5213079 U JP5213079 U JP 5213079U JP 5213079 U JP5213079 U JP 5213079U JP S55155866 U JPS55155866 U JP S55155866U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5213079U
Other languages
Japanese (ja)
Other versions
JPS584923Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979052130U priority Critical patent/JPS584923Y2/en
Publication of JPS55155866U publication Critical patent/JPS55155866U/ja
Application granted granted Critical
Publication of JPS584923Y2 publication Critical patent/JPS584923Y2/en
Expired legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP1979052130U 1979-04-20 1979-04-20 Horizontal sputtering equipment Expired JPS584923Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979052130U JPS584923Y2 (en) 1979-04-20 1979-04-20 Horizontal sputtering equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979052130U JPS584923Y2 (en) 1979-04-20 1979-04-20 Horizontal sputtering equipment

Publications (2)

Publication Number Publication Date
JPS55155866U true JPS55155866U (en) 1980-11-10
JPS584923Y2 JPS584923Y2 (en) 1983-01-27

Family

ID=29288494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979052130U Expired JPS584923Y2 (en) 1979-04-20 1979-04-20 Horizontal sputtering equipment

Country Status (1)

Country Link
JP (1) JPS584923Y2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295581A (en) * 1976-02-09 1977-08-11 Anelva Corp Sputiering apparatus
JPS536282A (en) * 1976-07-07 1978-01-20 Philips Nv Spattering process and apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295581A (en) * 1976-02-09 1977-08-11 Anelva Corp Sputiering apparatus
JPS536282A (en) * 1976-07-07 1978-01-20 Philips Nv Spattering process and apparatus

Also Published As

Publication number Publication date
JPS584923Y2 (en) 1983-01-27

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