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JPS55118541A - Downflow system laminar flow type clean room - Google Patents

Downflow system laminar flow type clean room

Info

Publication number
JPS55118541A
JPS55118541A JP2541379A JP2541379A JPS55118541A JP S55118541 A JPS55118541 A JP S55118541A JP 2541379 A JP2541379 A JP 2541379A JP 2541379 A JP2541379 A JP 2541379A JP S55118541 A JPS55118541 A JP S55118541A
Authority
JP
Japan
Prior art keywords
clean room
air current
laminar flow
ducts
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2541379A
Other languages
Japanese (ja)
Inventor
Aritsune Moriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SANKO AIR PLANT
SANKO KUKI SOCHI KK
Original Assignee
SANKO AIR PLANT
SANKO KUKI SOCHI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SANKO AIR PLANT, SANKO KUKI SOCHI KK filed Critical SANKO AIR PLANT
Priority to JP2541379A priority Critical patent/JPS55118541A/en
Publication of JPS55118541A publication Critical patent/JPS55118541A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)

Abstract

PURPOSE:To elevate efficiency in producing clean room which recessitate nondust, nonbacilius condition, by smooth streaming of horizontal directional air current in lower reaches than uniform speed line, not being in rush state. CONSTITUTION:Fresh air enters from air inlet push ducts 5 into a plenum chamber 2 and through a high performance filter 3 provided on a ceiling surface, blows out fron laminar flow push openings 4 and then enter into the clean room and finally is sucked through pull openings 6 into ducts. Side streaming air current keeps smooth flowing until arriving to air current energy reaching line 12, to which air current will arrive after passing of fixed time, without getting rush state and not generates vortex flow nor stagnations and current is exhausted smoothly and thus can get good clean conditions.
JP2541379A 1979-03-05 1979-03-05 Downflow system laminar flow type clean room Pending JPS55118541A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2541379A JPS55118541A (en) 1979-03-05 1979-03-05 Downflow system laminar flow type clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2541379A JPS55118541A (en) 1979-03-05 1979-03-05 Downflow system laminar flow type clean room

Publications (1)

Publication Number Publication Date
JPS55118541A true JPS55118541A (en) 1980-09-11

Family

ID=12165238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2541379A Pending JPS55118541A (en) 1979-03-05 1979-03-05 Downflow system laminar flow type clean room

Country Status (1)

Country Link
JP (1) JPS55118541A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58129124A (en) * 1982-01-29 1983-08-02 Hitachi Ltd Clean work room
US4515072A (en) * 1981-12-14 1985-05-07 Spraybake Limited Spraybooth
JP2018513343A (en) * 2015-04-20 2018-05-24 シネクシス・リミテッド・ライアビリティ・カンパニーＳｙｎｅｘｉｓ ＬＬＣ Clean room containing dilute hydrogen peroxide (DHP) gas and method of using the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4515072A (en) * 1981-12-14 1985-05-07 Spraybake Limited Spraybooth
JPS58129124A (en) * 1982-01-29 1983-08-02 Hitachi Ltd Clean work room
JPH0223775B2 (en) * 1982-01-29 1990-05-25 Hitachi Ltd
JP2018513343A (en) * 2015-04-20 2018-05-24 シネクシス・リミテッド・ライアビリティ・カンパニーＳｙｎｅｘｉｓ ＬＬＣ Clean room containing dilute hydrogen peroxide (DHP) gas and method of using the same
JP2021183902A (en) * 2015-04-20 2021-12-02 シネクシス・リミテッド・ライアビリティ・カンパニーSynexis LLC Clean rooms having dilute hydrogen peroxide (dhp) gas and methods of use thereof

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