Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
  • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers

Landscapes

• Engineering & Computer Science (AREA)
• Chemical & Material Sciences (AREA)
• Inorganic Chemistry (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
• Electrodes Of Semiconductors (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=10503176

Family Applications (1)

Country Status (5)

Family Cites Families (5)

• 1979
  • 1979-02-13 GB GB7905111A patent/GB2042801B/en not_active Expired
• 1980
  • 1980-02-06 JP JP1255780A patent/JPS55110039A/en active Pending
  • 1980-02-07 DE DE19803004480 patent/DE3004480A1/en not_active Withdrawn
  • 1980-02-13 IT IT8019876A patent/IT1209190B/en active
  • 1980-02-13 FR FR8003136A patent/FR2449332A1/en active Granted

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