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JPS5472685A - Electron beam exposure device - Google Patents

Electron beam exposure device

Info

Publication number
JPS5472685A
JPS5472685A JP14034177A JP14034177A JPS5472685A JP S5472685 A JPS5472685 A JP S5472685A JP 14034177 A JP14034177 A JP 14034177A JP 14034177 A JP14034177 A JP 14034177A JP S5472685 A JPS5472685 A JP S5472685A
Authority
JP
Japan
Prior art keywords
electron beam
exposure device
beam exposure
electron
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14034177A
Other languages
Japanese (ja)
Inventor
Riyuuichi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP14034177A priority Critical patent/JPS5472685A/en
Publication of JPS5472685A publication Critical patent/JPS5472685A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP14034177A 1977-11-22 1977-11-22 Electron beam exposure device Pending JPS5472685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14034177A JPS5472685A (en) 1977-11-22 1977-11-22 Electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14034177A JPS5472685A (en) 1977-11-22 1977-11-22 Electron beam exposure device

Publications (1)

Publication Number Publication Date
JPS5472685A true JPS5472685A (en) 1979-06-11

Family

ID=15266568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14034177A Pending JPS5472685A (en) 1977-11-22 1977-11-22 Electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS5472685A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006128068A (en) * 2004-09-29 2006-05-18 Hitachi High-Technologies Corp Ion beam processing apparatus and processing method
JP2012129212A (en) * 2004-09-29 2012-07-05 Hitachi High-Technologies Corp Ion beam processing device and processing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006128068A (en) * 2004-09-29 2006-05-18 Hitachi High-Technologies Corp Ion beam processing apparatus and processing method
JP2012129212A (en) * 2004-09-29 2012-07-05 Hitachi High-Technologies Corp Ion beam processing device and processing method

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