JPS546482A - Manufacture for semiconductor resistive element - Google Patents
Manufacture for semiconductor resistive elementInfo
- Publication number
- JPS546482A JPS546482A JP7259277A JP7259277A JPS546482A JP S546482 A JPS546482 A JP S546482A JP 7259277 A JP7259277 A JP 7259277A JP 7259277 A JP7259277 A JP 7259277A JP S546482 A JPS546482 A JP S546482A
- Authority
- JP
- Japan
- Prior art keywords
- resistive element
- manufacture
- semiconductor resistive
- semiconductor
- monolithic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 2
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/40—Resistors
- H10D1/43—Resistors having PN junctions
Landscapes
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To increase the degree of integration for monolithic IC by obtaining diffusion region having extremely narrow width and reducing the area of high resistive element, through the combination of diffusion method and ion injection method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7259277A JPS546482A (en) | 1977-06-16 | 1977-06-16 | Manufacture for semiconductor resistive element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7259277A JPS546482A (en) | 1977-06-16 | 1977-06-16 | Manufacture for semiconductor resistive element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS546482A true JPS546482A (en) | 1979-01-18 |
Family
ID=13493811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7259277A Pending JPS546482A (en) | 1977-06-16 | 1977-06-16 | Manufacture for semiconductor resistive element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS546482A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57500140A (en) * | 1980-02-08 | 1982-01-28 | ||
JPS63209764A (en) * | 1987-02-25 | 1988-08-31 | Ishikawajima Harima Heavy Ind Co Ltd | Electrostatic sorting device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4845184A (en) * | 1971-10-11 | 1973-06-28 |
-
1977
- 1977-06-16 JP JP7259277A patent/JPS546482A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4845184A (en) * | 1971-10-11 | 1973-06-28 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57500140A (en) * | 1980-02-08 | 1982-01-28 | ||
JPS63209764A (en) * | 1987-02-25 | 1988-08-31 | Ishikawajima Harima Heavy Ind Co Ltd | Electrostatic sorting device |
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