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JPS5434172A - Electromagnetic-shielding dust-proof constant-temperature chamber - Google Patents

Electromagnetic-shielding dust-proof constant-temperature chamber

Info

Publication number
JPS5434172A
JPS5434172A JP9959177A JP9959177A JPS5434172A JP S5434172 A JPS5434172 A JP S5434172A JP 9959177 A JP9959177 A JP 9959177A JP 9959177 A JP9959177 A JP 9959177A JP S5434172 A JPS5434172 A JP S5434172A
Authority
JP
Japan
Prior art keywords
electromagnetic
temperature chamber
proof constant
shielding dust
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9959177A
Other languages
Japanese (ja)
Inventor
Isao Tanabe
Yasuhiro Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9959177A priority Critical patent/JPS5434172A/en
Publication of JPS5434172A publication Critical patent/JPS5434172A/en
Pending legal-status Critical Current

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  • Details Of Measuring And Other Instruments (AREA)

Abstract

PURPOSE: To operate the device accurately by proivding electron beam device in electromagnetic-sheilding, dust-proof, and constant-temperture chamber.
COPYRIGHT: (C)1979,JPO&Japio
JP9959177A 1977-08-22 1977-08-22 Electromagnetic-shielding dust-proof constant-temperature chamber Pending JPS5434172A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9959177A JPS5434172A (en) 1977-08-22 1977-08-22 Electromagnetic-shielding dust-proof constant-temperature chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9959177A JPS5434172A (en) 1977-08-22 1977-08-22 Electromagnetic-shielding dust-proof constant-temperature chamber

Publications (1)

Publication Number Publication Date
JPS5434172A true JPS5434172A (en) 1979-03-13

Family

ID=14251328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9959177A Pending JPS5434172A (en) 1977-08-22 1977-08-22 Electromagnetic-shielding dust-proof constant-temperature chamber

Country Status (1)

Country Link
JP (1) JPS5434172A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02192534A (en) * 1988-07-26 1990-07-30 Takenaka Komuten Co Ltd Magnetic shield clean room

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02192534A (en) * 1988-07-26 1990-07-30 Takenaka Komuten Co Ltd Magnetic shield clean room

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