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JPS5429627A - Positive resist material and use thereof - Google Patents

Positive resist material and use thereof

Info

Publication number
JPS5429627A
JPS5429627A JP9545777A JP9545777A JPS5429627A JP S5429627 A JPS5429627 A JP S5429627A JP 9545777 A JP9545777 A JP 9545777A JP 9545777 A JP9545777 A JP 9545777A JP S5429627 A JPS5429627 A JP S5429627A
Authority
JP
Japan
Prior art keywords
resist material
positive resist
positive
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9545777A
Other languages
Japanese (ja)
Inventor
Hideo Ochi
Yoshimi Shibata
Koutarou Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Manufacturing Co Ltd filed Critical Somar Manufacturing Co Ltd
Priority to JP9545777A priority Critical patent/JPS5429627A/en
Publication of JPS5429627A publication Critical patent/JPS5429627A/en
Pending legal-status Critical Current

Links

Landscapes

  • Epoxy Resins (AREA)
JP9545777A 1977-08-09 1977-08-09 Positive resist material and use thereof Pending JPS5429627A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9545777A JPS5429627A (en) 1977-08-09 1977-08-09 Positive resist material and use thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9545777A JPS5429627A (en) 1977-08-09 1977-08-09 Positive resist material and use thereof

Publications (1)

Publication Number Publication Date
JPS5429627A true JPS5429627A (en) 1979-03-05

Family

ID=14138200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9545777A Pending JPS5429627A (en) 1977-08-09 1977-08-09 Positive resist material and use thereof

Country Status (1)

Country Link
JP (1) JPS5429627A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891632A (en) * 1981-11-27 1983-05-31 Oki Electric Ind Co Ltd Formation of microscopic pattern
JP2001022075A (en) * 1999-07-12 2001-01-26 Mitsubishi Rayon Co Ltd Resin for resist, chemical amplification type resist composition and resist pattern forming method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891632A (en) * 1981-11-27 1983-05-31 Oki Electric Ind Co Ltd Formation of microscopic pattern
JP2001022075A (en) * 1999-07-12 2001-01-26 Mitsubishi Rayon Co Ltd Resin for resist, chemical amplification type resist composition and resist pattern forming method
JP4544550B2 (en) * 1999-07-12 2010-09-15 三菱レイヨン株式会社 Resin resin, chemically amplified resist composition, and resist pattern forming method

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