JPS5423404B2 - - Google Patents
Info
- Publication number
- JPS5423404B2 JPS5423404B2 JP896173A JP896173A JPS5423404B2 JP S5423404 B2 JPS5423404 B2 JP S5423404B2 JP 896173 A JP896173 A JP 896173A JP 896173 A JP896173 A JP 896173A JP S5423404 B2 JPS5423404 B2 JP S5423404B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Control Of Linear Motors (AREA)
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP896173A JPS5423404B2 (en) | 1973-01-20 | 1973-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP896173A JPS5423404B2 (en) | 1973-01-20 | 1973-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49100513A JPS49100513A (en) | 1974-09-24 |
| JPS5423404B2 true JPS5423404B2 (en) | 1979-08-14 |
Family
ID=11707253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP896173A Expired JPS5423404B2 (en) | 1973-01-20 | 1973-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5423404B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6444127B2 (en) * | 2013-10-16 | 2018-12-26 | キヤノン株式会社 | Stage apparatus, lithographic apparatus, and article manufacturing method using the same |
| JP6353771B2 (en) | 2014-11-25 | 2018-07-04 | 株式会社日立製作所 | Linear motor and compressor equipped with linear motor |
-
1973
- 1973-01-20 JP JP896173A patent/JPS5423404B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49100513A (en) | 1974-09-24 |