JPS5422300B2 - - Google Patents
Info
- Publication number
- JPS5422300B2 JPS5422300B2 JP2098575A JP2098575A JPS5422300B2 JP S5422300 B2 JPS5422300 B2 JP S5422300B2 JP 2098575 A JP2098575 A JP 2098575A JP 2098575 A JP2098575 A JP 2098575A JP S5422300 B2 JPS5422300 B2 JP S5422300B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2098575A JPS5196605A (en) | 1975-02-21 | 1975-02-21 | Gasupurazumanyoru hotorejisutomakuno jokyoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2098575A JPS5196605A (en) | 1975-02-21 | 1975-02-21 | Gasupurazumanyoru hotorejisutomakuno jokyoho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5196605A JPS5196605A (en) | 1976-08-25 |
| JPS5422300B2 true JPS5422300B2 (de) | 1979-08-06 |
Family
ID=12042431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2098575A Granted JPS5196605A (en) | 1975-02-21 | 1975-02-21 | Gasupurazumanyoru hotorejisutomakuno jokyoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5196605A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5921015B2 (ja) * | 1978-06-14 | 1984-05-17 | セイコーエプソン株式会社 | レジストの除去方法 |
| JPS5696840A (en) * | 1979-12-28 | 1981-08-05 | Fujitsu Ltd | Microwave plasma treating method |
-
1975
- 1975-02-21 JP JP2098575A patent/JPS5196605A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5196605A (en) | 1976-08-25 |