[go: up one dir, main page]

JPS5419673A - Object trasfer device - Google Patents

Object trasfer device

Info

Publication number
JPS5419673A
JPS5419673A JP8425577A JP8425577A JPS5419673A JP S5419673 A JPS5419673 A JP S5419673A JP 8425577 A JP8425577 A JP 8425577A JP 8425577 A JP8425577 A JP 8425577A JP S5419673 A JPS5419673 A JP S5419673A
Authority
JP
Japan
Prior art keywords
jig
cleaning
trasfer
heat
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8425577A
Other languages
Japanese (ja)
Other versions
JPS614186B2 (en
Inventor
Hiroto Nagatomo
Tetsuya Takagaki
Ryoichi Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8425577A priority Critical patent/JPS5419673A/en
Publication of JPS5419673A publication Critical patent/JPS5419673A/en
Publication of JPS614186B2 publication Critical patent/JPS614186B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Branching, Merging, And Special Transfer Between Conveyors (AREA)

Abstract

PURPOSE: To simplify transfer work by parallel providing a cleaning jig 39 for cleaning and a heat-treating jig for heat treatment on a table, pulling up and moving the semiconductor wafer having been inserted into the cleaning jig by a buffer-reciever thereafter dropping the same into the heat-treating jig.
COPYRIGHT: (C)1979,JPO&Japio
JP8425577A 1977-07-15 1977-07-15 Object trasfer device Granted JPS5419673A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8425577A JPS5419673A (en) 1977-07-15 1977-07-15 Object trasfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8425577A JPS5419673A (en) 1977-07-15 1977-07-15 Object trasfer device

Publications (2)

Publication Number Publication Date
JPS5419673A true JPS5419673A (en) 1979-02-14
JPS614186B2 JPS614186B2 (en) 1986-02-07

Family

ID=13825340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8425577A Granted JPS5419673A (en) 1977-07-15 1977-07-15 Object trasfer device

Country Status (1)

Country Link
JP (1) JPS5419673A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870546A (en) * 1981-10-23 1983-04-27 Hitachi Ltd Goods transfer device
US4611966A (en) * 1984-05-30 1986-09-16 Johnson Lester R Apparatus for transferring semiconductor wafers
US4695217A (en) * 1983-11-21 1987-09-22 Lau John J Semiconductor wafer transfer apparatus
JPS631621A (en) * 1987-06-05 1988-01-06 Fujitsu Ltd Sample transport method
EP1635380A1 (en) * 1997-04-02 2006-03-15 Tokyo Electron Ltd. Cleaning and drying apparatus, wafer processing system and wafer processing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870546A (en) * 1981-10-23 1983-04-27 Hitachi Ltd Goods transfer device
US4695217A (en) * 1983-11-21 1987-09-22 Lau John J Semiconductor wafer transfer apparatus
US4611966A (en) * 1984-05-30 1986-09-16 Johnson Lester R Apparatus for transferring semiconductor wafers
JPS631621A (en) * 1987-06-05 1988-01-06 Fujitsu Ltd Sample transport method
EP1635380A1 (en) * 1997-04-02 2006-03-15 Tokyo Electron Ltd. Cleaning and drying apparatus, wafer processing system and wafer processing method

Also Published As

Publication number Publication date
JPS614186B2 (en) 1986-02-07

Similar Documents

Publication Publication Date Title
DE2966008D1 (en) Device for the precise alignment of planar workpieces, e.g. semiconductor wafers
JPS5434774A (en) Article transfer device
JPS5419673A (en) Object trasfer device
JPS5210069A (en) Automatic apparatus for cleaning and drying wafer
JPS5390033A (en) Heat treatment equipment
JPS5318967A (en) Wafer sucking jig
JPS51135052A (en) Automatic slate transfer machine
JPS5245874A (en) Transfer device of semiconductor substrate holding device
JPS54984A (en) Containing tool for semiconductor wafer
JPS53570A (en) Aligning apparatus for rod-like articles
JPS5439576A (en) Inspection method for semiconductor device
JPS522956A (en) Article transfer apparatus
JPS523385A (en) Semiconductor device
JPS53136484A (en) Wafer continuous machining method and unit used for the same
JPS5286610A (en) Apparatus for preventing dripping of drain
JPS5432278A (en) Semiconductor device
JPS5442976A (en) Lead dipping method for semiconductor device
JPS5234666A (en) Semi-conductor wafer processing
JPS5223745A (en) High frequency heating device
JPS542673A (en) Positioning jig for semiconductor wafer
JPS544568A (en) Semiconductor device and production of the same
JPS533061A (en) Semiconductor heat treatment method and members used for the same
JPS5351962A (en) Dicing unit providing automatic handling mechanism
JPS5417679A (en) Semiconductor device and its manufacture
JPS5360072A (en) Device for transferring article