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JPS5419665A - Side etching method of semiconductor pellets - Google Patents

Side etching method of semiconductor pellets

Info

Publication number
JPS5419665A
JPS5419665A JP8425477A JP8425477A JPS5419665A JP S5419665 A JPS5419665 A JP S5419665A JP 8425477 A JP8425477 A JP 8425477A JP 8425477 A JP8425477 A JP 8425477A JP S5419665 A JPS5419665 A JP S5419665A
Authority
JP
Japan
Prior art keywords
semiconductor pellets
side etching
etching method
side faces
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8425477A
Other languages
Japanese (ja)
Inventor
Yukio Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8425477A priority Critical patent/JPS5419665A/en
Publication of JPS5419665A publication Critical patent/JPS5419665A/en
Pending legal-status Critical Current

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  • Weting (AREA)

Abstract

PURPOSE: To accurately control side etching quantity and completely remove cutting distortions produced in the side faces by beforehand covering both front and back surfaces of semiconductor pellets with transparent or translucent acid-resistant wax films and measuring the protruding quantity of the wax films while etching the side faces.
COPYRIGHT: (C)1979,JPO&Japio
JP8425477A 1977-07-15 1977-07-15 Side etching method of semiconductor pellets Pending JPS5419665A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8425477A JPS5419665A (en) 1977-07-15 1977-07-15 Side etching method of semiconductor pellets

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8425477A JPS5419665A (en) 1977-07-15 1977-07-15 Side etching method of semiconductor pellets

Publications (1)

Publication Number Publication Date
JPS5419665A true JPS5419665A (en) 1979-02-14

Family

ID=13825315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8425477A Pending JPS5419665A (en) 1977-07-15 1977-07-15 Side etching method of semiconductor pellets

Country Status (1)

Country Link
JP (1) JPS5419665A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109309001A (en) * 2017-07-26 2019-02-05 天津环鑫科技发展有限公司 Method for manufacturing GPP chip by adopting printing process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109309001A (en) * 2017-07-26 2019-02-05 天津环鑫科技发展有限公司 Method for manufacturing GPP chip by adopting printing process

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